HRX-OM-R016

circulating fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-2 9.1.3 Communication specifications . 9-3 9.2 Outline dimensions . 9-4 9.3 Flow Chart . 9-5 9.3.1 HRS030-A-20-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5

HRX-OM-W060

. 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-10 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity

JIS Standard Hydraulic Cylinder

1800 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 21.5 15 52 1 40 M10 x 1.25 25 to 1800 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 12 15 52 52 1/3.5 stroke 1 50 M10 x 1.25 25 to 1800 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 15 15 52 55 2 63 M12 x 1.5 25 to 1800 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5 161 15 20 55 65

HRX-OM-W038

and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-2 9.1.3 Communication specifications . 9-3 9.2 Outline dimensions . 9-4 9.3 Flow Chart . 9-5 9.3.1 HRS040-A-20-(BJMTWZ) . 9-5 9.3.2 HRS040-W-20-(BJMTW) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS040--20-(BJMTWZ). 9-7 9.5 Heating capacity

VZ100/300/500

Plate Assembly Manifold gasket DXT170-25-1A Manifold gasket Round head combination screw (With spring washer) Applicable base VV3Z1-01-1 VV4Z1-20-1 Blanking plate Manifold base Applicable base VV3Z1-01-1 VV4Z1-20-1 Manifold gasket Manifold base Mounting Screw Tightening Torques Caution Applicable base VV3Z1-01-1 VV4Z1-20-1 M2.5: 0.45 Nm Warning Manifold base When mounting a solenoid valve

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

HRL

100 Cooling capacity Power supply CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Cooling method A Air-cooled refrigeration Specifications Model HRL100-Am-20 HRL200-Am-20 HRL300-Am-20 CH1 CH2 CH1 CH2 CH1 CH2 Cooling method Air-cooled

10

) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces, same surface) 15 25 30 n (Same surface

0.4

VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,

Intrinsically Safe Valve

) Manifold series 5 7 53-SY5000 Manifold base (5 stations) 53-SS5Y5-20-05 53-SY7000 Stations Stations 3 2 1 02 2 stations 20 20 stations 53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

(8) UV = Up to 400 mm/s; Up to 10 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0 0.01 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) Graph (12) V = Up to 400 mm/s; Up to 50 mm stroke CXSJM CXSJL Graph (13) V = Over 400 mm/s; Up to 50 mm stroke CXSJM CXSJL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01

MB

20 25 30 32 30 35 40 45 45 55 60 13 13 14 14 20 20 27 47 51 58 58 72 72 97 16 16 16 16 16 16 20 4 4 5 5 5 5 6 M6 x 1.0 6 6 7 7 10 10 13 M10 x 1.25 27 27 31.5 31.5 38 38 38 1/8 1/4 1/4 3/8 3/8 1/2 1/2 84 84 94 94 114 114 120 4 4 5 9 11.5 17 17 6.5 9 10.5 12 14 15 15 178 186 210 210 258 258 314 90 90 102 102 124 124 132 184 192 218 218 268 268 326 22 30 35 35 40 40 54 13 14 15.5 16.5 19 19

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

boot 32 40 50 63 80 100 125 16 32 10 M10 x 1.25 6 M6 x 1 13 26 G 1/8 7 12 4 30 4 47 Up to 1000 Up to 1000 22 94 4 146 32.5 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 30 G 1/4 9 16 5 35 4 54 Up to 1900 Up to 1000 24 105 4 163 38 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 37 G 1/4 10.5 20 6 40 4 66 Up to 1900 Up to 1000 32 106 4 179 46.5 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 37 G 3/8 12 20 9 45 4 77 Up

Industrial Filters

20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150

HRX-OM-R005

fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.