7.4

Example) -KR Note 2) Indicate the wiring specifications for mixed single and double wirings. Note 3) For details, refer to page 755. For manifold optional parts, refer to pages 755 to 757.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

Antistatic Tubing TA  Series

Operating Pressure Material Surface resistance Antistatic polyurethane 104 to 107 DM Max. operating pressure (MPa) Note) Miniature fittings: Only the following types are available for M and MS series KDM M Series MS Series M-3AU-3, M-3AU-4, M-5AU-3, M-5AU-4 M-5AU-6, M-5H-4, M-5H-6 MS-5AU-3, MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 KB How to Order KR 100 TAU1065 B KA Operating temperature (C)

TUS Series Soft Polyurethane Flat Tubing Multi-core, Multi-color Specification

KR How to measure the minimum bending radius Max. Operating Pressure Specifications KA 3.0 Bend the tube into a U shape at a temperature of 20C. Fix one end and bend the loop gradually. Measure 2R when the tube breaks or is crushed.

TKS

KR Operation Caution KA KQG2 1.When using a tool such as air driver, use a pushstart type which rotates after the tubing is inserted. 2. Do not insert the tube when the TKS is rotating, as the pawl may be damaged. KG KFG2 MS KKA KP LQ MQR T T IDK 489

TUH

Operating Pressure KC Fluid Air KK 7 20C 1.0 Max operating pressure (MPa) 40C 0.85 KK130 6 60C 0.7 Max. operating pressure (MPa) DM Applicable fittings One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings 5 Min. bending radius (mm) 10 15 20 27 35 KDM Operating temperature 20 to 60C 4 KB Material Polyurethane 3 KR How to Order 2 KA TUH0604 B 20 1 KQG2 0 -20 0 20 KG

Polyurethane Tubing TU/TIUB Series

Operating Pressure Black (B) M White (W) 1.2 H/DL L/LL Red (R) Max. operating pressure (MPa) 1.0 Blue (BU) KC Yellow (Y) 0.8 Green (G) KK 0.6 Clear (C) Orange (YR) KK130 0.4 Solid blue (BU1) Clear blue (BU2) 0.2 DM Medium blue (BU3) 0 20 0 20 40 60 KDM Brown (BR1) Operating temperature (C) Solid green (G1) KB Clear green (G2) Neon green (G3) Precautions KR Dark green (G4) Gray (GR1) KA Be

T/TIA

reel 500 m reel 20 m roll 250 m reel 500 m reel Black, White, Red, Blue, Yellow, Green KM X3 KF Red, Blue, Yellow, Green X4 Black, White X64 M H/DL L/LL Reinforced corrugated cardboard specification: Longer length reel/-X64 Dimensions KC Dimensions KK Model D1 D2 D3 W Weight (kg) Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR

One-touch Fittings

In such a place, use of flame resistant fittings (KR/KRM series) and flame resistant tubing (TRS/TRB/TRBU/TRTU series) are recommended. 7. Do not use in an environment where the product is directly exposed to cutting oil, lubricant, coolant oil, etc. Please contact SMC if using for an environment exposed to cutting oil, lubricant or coolant oil, etc. 8.

DMK

KK130 DM DM Clamp ring KDM Installation and Removal of One-touch Mini Fittings KB Caution KR Installation of tubing 1. Cut the tube perpendicularly, using caution not to damage its surface. (Use tube cutter TK-1, 2 or 3. Do not cut the tube with cutting pliers, nippers, scissors, etc.) 2. Grasp the tube, then slowly push it until it comes to a stop. 3.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

25 32/40 NZ Mounting type Z NY Mounting type Y NX Mounting type X NM1 Mounting type M1 NM2 Mounting type M2 NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 Manufacturer Series Type MELSERVO-JN HF-KN Mitsubishi Electric Corporation MELSERVO-J3 HF-KP MELSERVO-J4 HG-KR

S Couplers KKA Series Stainless steel type

Check valve on single side: KDM Effective Area No check valve on either side: KB Effective area mm2 Built-in check valve Socket Plug KKA3S-01F KKA3P-01F 17.4 KR Characteristics with check valve on both sides KKA4S-02F KKA4P-02F 26.4 KA KKA6S-04F KKA6P-04F 54.2 Liquid dripping cm3 at each removal Aeration cm3 at each removal Plug: With check valve Socket: With check valve Body size KKA7S-06F

KPQ/KPG

Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Series TRTU Flame Resistant (Equivalent to UL-94 Standard V-0) FR Three-layer Polyurethane Tubing

FR one-touch fittings: Series KR-W2 Metal one-touch fittings: Series KQB2 Applicable fittings 0.8 MPa At 20C Max. operating pressure 0.65 MPa At 40C How to measure the minimum bending radius 0.5 MPa At 60C Burst pressure Refer to the burst pressure characteristics curve.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

DIN terminal without connector Symbol Specifications DC (0.35 W) AC Note 4) Nil Standard (0.9 W) B Note 1) High speed response type High pressure type (Metal seal type only) (0.9 W) With surge voltage suppressor K Note 1) External pilot type R Note 1, 2, 3) 24VDC 24VDC High speed response/External pilot type BR Note 1, 2, 3) (0.9 W) High pressure/External pilot type (Metal seal type only) KR

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C Metal speed controller 5 2 Dimensions not shown are the same as standard type.

5 Port Solenoid Valve

Example) -KR Note 2) Indicate the wiring specifications for mixed single and double wirings. Note 3) For details, refer to page 85. For manifold optional parts, refer to pages 85 to 87.