High Vacuum L Type Valve Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLAV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).
For example, if -0.15 C is set here, the actual reference temperature for control is lower than the indicated SV by 0.15 C. 5.6 Preparation for facility water M5,M6 screws (bolts) or equivalent to the fix the product.
Mounting the actuator Maximum A(mm) L(mm) Model Bolt size Tightening torque(Nm) LEJ40 M5 3.0 5.5 36.5 LEJ63 M6 5.2 6.8 49.5 Mounting the workpiece Maximum L(Maximum thread Model Bolt size Tightening depth: mm) torque(Nm) LEJ40 M6 x 1 5.2 10 LEJ63 M8 x 1.25 12.5 12 Mounting reference plane 34 - 7.4 Plug and unplug the Cable and the Motor cover Caution 1.
Use N NPT 5 AC100-240V M5,M6 screws (bolts) or equivalent to the fix the product. Note) Only HECR010 with AC200-240V Be sure to correctly tighten all screws to the required torque.
MXQ MXF Lateral Mounting (Body through-hole) Lateral Mounting (Body thread) MXW MXJ MXP L1 L L1 MXY MTS L1 12.7 15.6 20.6 24.0 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Model MXH6 MXH10 MXH16 MXH20 L1 12.7 15.6 20.6 24.0 L 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10
x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5
L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.
counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6
Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 3 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (optional) 30 2 25 Bracket (optional) SMC Max. 4 Panel mounting hole SMC Pressure gauge (optional) Panel Max. 4 Pressure gauge (optional) Panel 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 Approx. 123
Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.
Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.
x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10 * flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033
www.stevenengineering.com I 5.29 AIR PREPARATION AUTO DRAINS D I M E N S I O N S M6 Hex Cap Bolt (applicable hex. wrench normal size 5) M6 Hex Cap Bolt (applicable hex. wrench normal size 5) Pilot Exhaust Port (both sides) Label Flushing Button Bleed Valve Bracket Mounting Hole (both sides) Bracket (Option) Drain Inlet 1 2 Female Thread See How To Order for type of thread.
X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63
X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 10 14 18 18 22 26 With Mounting Bracket * Refer to basic mounting/(B) for other dimensions and with rod boot.
(PA port) Rc 1/8 NO 2(A) 32 42 52 PA 3(R) NC 1(P) Switch mark Rc 1/4, 3/8 47 2-5.2 (Mounting hole) (R port) 41.6 69 68 29.5 28.5 22.5 13.5 Rc 1/4, 3/8 (P port) 5-5-18 7 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA742112.5 41 31.5 (PA port) Rc 1/8 NC NO 2(A) 40 33 PA 4.5 SA Switch mark 2-5.2 52 (Mounting hole) VA (PA port) (Rc 1/8) (Mounting groove for M6
IP CODE IP65 INPUT 16 EX500-IB1 VOLTAGE 24 VDC/650 mA EEX500-IB1-M6 (1 set) EX500-IE1 (8 sets) MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN Unit side MADE IN JAPAN TYPE1 US C R 24 VDC/60 mA/IP65 (PNP) EX500-IE1 Input block EX500-IE1 (4 sets) TYPE1 US C 24 VDC/60 mA/IP65 (PNP) EX500-IE1 R MADE IN JAPAN TYPE1 US C 24 VDC/60 mA/IP65 (PNP) EX500-IE1 R EEX500-IB1-E8 1
Lateral Mounting (Body through-hole) Lateral Mounting (Body tapped) Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 Vertical Mounting (Body
Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.
x 1 9 0V 75 220 55 114 89 75 56 M6 x 1 9 50msec PF2A7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate