XLAQ/XLDQ Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
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Size: 3 (Series 30), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: A (Aluminum), Seal Material: N (NBR), Orifice Diameter/Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)
Size: 3 (Series 30), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: A (Aluminum), Seal Material: N (NBR), Orifice Diameter/Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)
Size: 3 (Series 30), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: A (Aluminum), Seal Material: N (NBR), Orifice Diameter/Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 4 (220 VAC), Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)
Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DS (DIN Terminal, w/Surge Voltage Suppressor)
Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)
Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)
Size: 30, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DIN Terminal, w/Surge Voltage Suppressor, Coil Orientation: -, Blow Port Position: -, Oil-free Option: -
Size: 30, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: -, Blow Port Position: -, Oil-free Option: -
Size: 30, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: -, Blow Port Position: -, Oil-free Option: -
Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.
O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3
Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.