VZ3000

248 237.5 216 16 Stations L1 L2 L3 L4 (Pitch) L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors. Note 9) Select L, L#, or W for (6) Wiring Combinations for the single unit model.

5 Port Solenoid Valve SY Series

) 64.2 33.6 40.9 [47.9] + 36.6 25.5 10 (For mounting) 24.4 24.9 (Light/surge voltage suppressor) [1(P), 5(EA), 3(EB) port] 1/4 23 0.5 0.5 36.6 51.5 5EA 1P 3EB 49.8 M8 connector (W0): 3 4 5 L plug connector (L): M plug connector (M): 3 4 5 SY9 20-DC8, N9 C10, N11 C12 DIN plug connector (D): 3 4 5 SY9 20-W0C8, N9 C10, N11 C12 3 4 5 SY9 20-MC8, N9 C10, N11 C12 C8, N9 C10, N11 C12 SY9 20-L(Lead

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

LVQ

LQ3 V S 28.5 57 34.5 69 103 16.5 106 112 V S 28.5 57 34.5 69 108 22 120 126 (H) V S 42 84 48 96 165 25 164 168 42 84 48 96 175 32 177 M N Model J L M N Q Y LVQH20Sm-1 LVQH30Sm-1 LVQH40Sm-1 LVQH50Sm-1 LVQH60S-Vm-1 V S 21.8 5 7 15 21 55 C V S 32 6 7 20 25 80 B A V S 37.5 6 7 20 25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

Air Cylinder

JM-045 JM-10 JM-10 JM-045 JM-045 *Components include in a seal kit.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Add 10 g for conduit type, 30 g for DIN terminal type, and 60 g for conduit terminal type respectively. Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 0.61 4.5 15 3 8 (10A) 1.1 6 26 8 1.6 38 1.0 10 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type.

IDU/IDF

Operating air pressure Air discharge if no drainage 6 l (ANR) each time 0.3MPa Model Air flow capacity (l/min (ANR)) 50/60Hz IDF2D 120 140 IDF1D 85 100 IDF4D 215 250 IDF3D 180 210 10 l (ANR each time 0.5MPa 50Hz 60Hz 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min. Operation time: 2 sec./min. IDF220B to 370B standard.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to the

%silltr

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

Digital Flow Switch (Integrated display type)

10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Reference condition 3 Standard condition

Industrial Filters

13 18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

CM2

SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A, #10 SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.

CV/MVGQ

-15-72 Valve Mounted Cylinder Double Acting, Single Rod Series CVS1 Single Clevis Style: CVS1C Lube type (CVS1C), Non-lube type (CVS1CN) With rod boot Width across flats B1 RE A B REC Connection port A CX ZZ + l + Stroke Z + l + Stroke h + l CY S + Stroke Z + Stroke ZZ + Stroke MQQ M Stroke range Bore size (mm) A AL B B1 C D E F H1 HX CDH10 CX J K L MM RHC (mm) 40 50 63 80 100 10 10 10 14

Table of Contents

The manifold no. shown below is for the L kits. For other kits the standard manifold can be used. Please contact for negative COM S kit. (Pitch) How to order negative COM valves VQ1130 N 5 C6 L = 12.5 x n + 10.5 L Dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No.

240

Load Eccentricity 200 mm Graph n n Load Eccentricity 200 mm 10 10 1 Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 1 0.1 0.1 10 10 6 6 0.1 0.01 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example (Horizontal Mounting) 2.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

FT FX FY FZ L U Z ZZ TD TT TX TY TZ LH LS B C2 RR Front Rear Front Rear Front Rear Front Rear MGG 20 25 32 40 400 300 300 400 300 9 10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300

VQ5000

(except L and T1 kits) Note 3) Available only for F, L and T1 kits. Note 4) IP65 is available only for L, T and S kits. Note) In case of CM indicate on a specification sheet.