CV/MVGQ

20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 Up to 600 601 to 1000 MK(2) Up to 750 751 to 1000 Up to 750 751 to 1000 RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

Modular/F.R.L. Units Series AC

25 89 70 20 27 4.5 4.5 7 2.8 24.5 30 132 118 114 24 33 5.5 12 5.5 3.2 29 151 176 41 184 150 156 35 7 14 4 41 7 154 179 41 187 153 159 35 7 14 4 41 7 191 216 50 222 190 196 40 9 18 4 48 9 193 218 50 224 192 198 40 9 18 4.6 48 9 271 297 70 303 270 277 50 11 20 6.4 60 11 285 310 70 316 284 290 50 11 20 6.4 60 11 288 313 70 319 287 293 50 11 20 6.4 60 11 Note) For the AC20B only, the

Compact and Lightweight

Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 200 80 80 200 Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 60 60 150 60 60 150 Suction flow rate 40 40 100 40 40 100 Suction flow rate 20 20 50 20 20 50 0 0 0 0 0.1 0.2 0.3

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Electric actuator / Slider type Specific precautions . 20 3.1 Design . 20 3.2 Slection . 20 3.3 Handling . 20 3.4 Precaution on maintenance . 22 4. Troubleshooting . 22 -1- LEJ series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

IDX-OM-Z004

10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

With Rod Boot Bore size (mm) e f h ZZ Stroke range (mm) l 40 50 63 80 100 20 to 500 43 11.2 59 1/4 stroke 154 20 to 600 52 11.2 66 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 178 Dimensions of the mounting brackets are the same as those of the standard double acting single rod type.

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Digital Flow Switch

4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

PFxx-OMA1007

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

Modular F.R.L. Unit

20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

20 10 10 1.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8