Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Sensor: T1 (-100 to 100 KPa), Option: EM (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side)

Sensor: T1 (-100 to 100 KPa), Option: EMY (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side + Vacuum "V" port Release to Atmosphere Type, C

Sensor: T1 (-100 to 100 KPa), Option: ER (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + w/Manual Override for Residual Pressure Release)

Sensor: T1 (-100 to 100 KPa), Option: EMR (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Relea

Sensor: T1 (-100 to 100 KPa), Option: EMY (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + Plug for Individual Supply, Blocking the Air Supply Passage to D Side + Vacuum "V" port Release to Atmosphere Type, C

Sensor: T1 (-100 to 100 KPa), Option: MR (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Release)

Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]

Sensor: T1 (-100 to 100 KPa), Option: Y (Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)

SMCs series CA2-Z air cylinder is 15% lighter than the existing CA2 cylinder.? Fine adjustment is now possible due to the increase in the air cushion?adjustment range.? The CA2-Z can now be ordered with rod end or pivot brackets, and mounting dimensions are the same as the existing CA2.?

SMCs series CA2-Z air cylinder is 15% lighter than the existing CA2 cylinder.? Fine adjustment is now possible due to the increase in the air cushion?adjustment range.? The CA2-Z can now be ordered with rod end or pivot brackets, and mounting dimensions are the same as the existing CA2.?

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, THERMISTER SENSOR (T1& T2), REFRIGERATED THERMO-COOLER, 737

Precision Clean Regulator

ITV 2 1 Options IC Bracket ITVH Model B21-1-T1 Rolled steel plate (electroless nickel plated) Material ITVX Pressure gauge Product part no. SRP1-M5 SRP1-01 Pressure gauge part no.

Low Profile

3-port direct operated poppet valve Type of actuation Normally closed Universal Universal Fluid*1 Air, Nitrogen Operating pressure range [MPa] 100 kPa to 0.2 Proof pressure [MPa] 0.6 Ambient and fluid temperatures [C]*2 0 to 50 C [dm3/(sbar)] 0.25 0.12 0.5 Cv 0.07 0.032 0.14 b 0.25 0.25 0.3 Flow rate [L/min (ANR)] at 0.2 MPa*4 45 22 90 Response time [msec]*3 ON, OFF: 10 or less ON, OFF: 15

PSE540/560

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1

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Se page 15 minimum Auto Switch mournable strckes.

Pressure Range: 0~0.97MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 15 (NPN Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Pressure Range: 0~0.97MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 15 (NPN Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: L (Grommet Lead Wire 3m)

Piping Specification: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 15 (NPN Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: L (Grommet; Lead Wire 3m)

Piping Specification: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 15 (NPN Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: C (Plug Connector; Lead Wire 0.6m)