Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

REA/REB

1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

REA/REB

RE A B Maximum load weight (Wmax) + Static moment (M) n = Load weight (W) Allowable static moment (Mmax) + Dynamic moment (Me) Allowable dynamic moment (Memax) 1 REC CX Load Weight CY W Maximum Load Weight (kg) W MQQ M 50 40 30 REBHT32 Wmax Model REBH15 9 REBH25, REBHT25 25 RHC REBH25 20 25 16 REBHT25 REBH15 10 MK(2) Load weight (kg) REBHT32 40 9 5 4 3 W RS Q G 2 W RS H A 1 RZQ 0.5 MI W

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External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

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I '" ~ 1 Width across M5XO.B flats 8 "l t w Width across M8X 1.25 flats 12 t= II >:, 0 ] ", ) W >:loJ " ~ ~ Flat with rib Flat with rib !ll. M ,8 , ~ iiI ,. Deep type/ ZPT4OD only Deep type/ZPT25D only , Appl cable t be 0 D 91 ~ I One-touch " Applicable tube 0 0 One-touch tube fitting Wldt~~across ~~. Width across fl 1 ~ flats 8 tube fitting IS " M6XO.75 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(g) Note 2) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: Weight of DIN rail) Note 1) In cases such as those where many valves are operated simultaneously, use station B (SUP/EXH block on both sides), applying pressure to the P ports on both sides and exhausting from the R ports on both sides.

Table of Contents

m C Lead wire length 0.6 m CL Lead wire length 3.0 m CN W/o lead wire L LN Lead wire length 0.3 m Connector type Y DC: 0.45 W (With indicator light: 0.5 W) Without lead wire (Applicable to only DC) Plug connector type LO Without connector M Lead wire length 0.3 m 24 VDC and 12 VDC are applicable to 0.45 W.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

AC

The pressure at the bottom of piston w decreases, causing the pressure in upper chamber t to become greater than the pressure in lower chamber y. So, piston w descends, causing the hole of valve r to be closed by valve seal e.

Modular F.R.L. Unit

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

MN MO WO W L plug connector 3 M plug connector 220 VAC50/60Hz [230 VAC50/60Hz] 4 For type "W", DCvoltage is only available.

ITV_D-E

Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s operat i on m anual ref ers t o general di gi t al i nput t ype ( m odel : X93) and i s part i al l y appl i cabl e t o anot her speci al m odel s.

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PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Table of Contents

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

Proposals for Energy Saving

Note 3) The flow rate unit is based on 0C and 101.3kPa. 87 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series PFA Sensor Unit Construction PFA710/750 PFA510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PFA711/721/751 PFA511/521/551 q w e r t y Parts list No. 1 2 3 4 5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Smooth Cylinder/Low Speed Cylinder

Dd9 Applicable d L L1 m t Part no.