CG1

/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Check Valve Series AK

q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8 5/32, 1/4 5/16 x NPT 1/8 8, 10, 12 5/16, 3/8, 1/2 Free flow Female thread Male thread t r t r Free flow One-touch fitting Male

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port) 153.6 L 66.5 (For E type) (Lead wire length) 1.55 0.3 mm2 22 18 18 9.5 28 5 x 1/4" (Piping ports) L plug connector with cover (LL) 52-SY5240 (R) -LL-02 L 143.4 (Lead wire length)

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

PSE540/560

M5 female thread, through type M3 M3 x 0.5 ISA2 IM5 M5 M5 x 0.8 IS Option/Part No. M5 female thread, through type (With mounting hole) 01 R 1/8 (With M5 female thread) IM5H Note Description Part no. N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Series M Miniature Fittings M3, R(PT) 1/8, M5

For Electroless Nickel add -X2. 88 Miniature Fittings M3, R(PT) 1/8, M5 Series M Available Configurations Series/Model Series/Model Series/Model Type Note Note Note Application Type Application Type Application Tee Barb fitting Barb fitting M-5AN-4 For soft nylon tube. 3.18/2.18 4/2.5 M5 female -M5 female -M5 female Both sides allow 90 connection. M-3AU-3 For nylon tube.

Series SYJA300 3 Port Air Operated Valve

holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13 5 8.6 10 (P, A, R port) 3-M5 X 0.8 23 3.3-2 3 Port Air Operated Valve Series SYJA500/700 Model Valve model Actuation Port size Weight (g) Pilot port size Effective area (mm2) (Cv) SYJA512-M5 N.C. 3.6 (0.2) 45 Body ported M5 X 0.8 SYJA522-M5 N.O.

Modular F.R.L. Units

1 q r e w t i u y o !0 !

LEC-OM02704CN

3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25