Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

Digital Flow Switch (Integrated display type)

Data stored every 5 minutes: 5 minutes x 3.7 million cycles = 18.5 million minutes = 35 years Data stored every 2 minutes: 2 minutes x 3.7 million cycles = 7.4 million minutes = 14 years : The value is stored in memory every 2 or 5 minutes.

Manifold Specifications

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

Vacuum Unit

5/16" Metric size: 2 x 8 1 Vacuum break flow adjusting needle 79 (Ejector system) 84 (Vacuum pump system) 2 x Common supply (PD) port4 Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 54.8 26.4 2.6 62 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 53 45.9 37.4 38 36 D 8.4 B 26.4 2 x Common exhaust (EXH) port2 n x Individual exhaust (EXH) port3 3.5 10.5

Process Pump

Fluoropolymer Tubing Series TL/TIL Specifications TL0403 TL0604 TL0806 TL (Metric) TL1916 TL1210 TL1008 4 x 3 6 x 4 8 x 6 19 x 16 12 x 10 10 x 8 Model Tubing model O.D. x I.D. (Metric) TIL01 TILB01 TIL05 TIL (Inch) TIL13 TIL11 TIL07 1/8" Model Tubing model Nominal size (Inch) O.D. x I.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Series VQ Metal Seal/Rubber Seal Body Ported

Multicore vinyl cable 0.3mm2 X 25C Terminal No.

Gun Type Ionizer

Flow setting: 7 300 250 200 Flow setting: 6 150 Flow setting: 4 100 Flow setting: 0 Flow setting: 2 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Pressure [MPa] How to measure Pressure measurement Air supply measurement Connecting tube: O.D. 8 x I.D. 5, 50 mm 184 Gun Type Ionizer IZG10 Series RoHS How to Order IZG10 08 01 01 AC adapter*1, Power supply cable One-touch fitting Nozzle type Symbol Port size

NCM

Load Switch 1 Load Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from switch is 1 mA. Power supply Residual Load voltage at ON = voltage voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

12 X 12 n U SIDE 4B 4A 4 B A 3B 3A 3 8 2B 2A 2 1B 1A 1 2 4 NO.

25

x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

-fl Seies

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

NARM Series

n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

HRX-OM-R016

Rated Rated Sensitivity supply voltage x size voltage current of leak [V] [A] current [mA] 3 cores x 10 30 HRS030--20 1-phase 14AWG (3 cores x 2.0mm2) 200, 200-230V AC 230 HRS030--20-T (50/60Hz) 15 30 (including (High pump head [Optional]) ground) HRS Series 3.3 Installation 3-9 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective