VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

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6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port size R Port M5 0.8 M5T M5 0.8 A, B Port M5 0.8 A, B Port M5 0.8,N3T P Port M5 0.8 P Port NPTF N3T One-touch fitting Type 41(5 Port / Base mounted type) Applicable solenoid valve: SYJ3 40SYJ3 43SS5YJ341-05 --N3T Type 41 Type S41 Single solenoid coil is located on same side as the A, B port. ( ) Applicable blank plate ass'y: SYJ3000-21-2A Valve mounting direction

3 Port Solenoid Valve

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

VZ100/300/500

(L) VZ32-L-M5 M plug connector (M) VZ32-M-M5 DIN terminal (D) VZ32-D-M5 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-16 17 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 Base Mounted (With sub-plate) Grommet (G), (H) VZ34-01 G H V100 SY SYJ VK Manual override (Non-locking) (Mounting hole)

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

KP/KPQ/KPG

1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06

Electric Rotary Table

D-G

One-touch Fittings

[mm] 1 D D Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2D04-M5G1 10 8.2 7.7 10 15.8 20.7 21.8 13.3 5.7 6 3.2 2.2 2.2 1.8 6.6 6 M5 x 0.8 KQ2D06-M5G1 12 10.4 9.7 12 16.8 21.7 23.9 13.3 6.7 6 3.2 4.3 4.3 1.8 9.8 Oval type N O 4, 6 M L1 1: D is maximum diameter.

IZS30_eng

How to order I Z S 3 0 7 8 0 S B I Z S 3 0 D 1 I Z S 3 0 C S I Z S 3 0 B E I Z S 3 0 N T Ionizer Bracket Product name I Z S 3 0 Bar type Ionizer B Mounted Not mounted For "mounted", two brackets for body end are attached. Number of attached bracket for body middle part is by the bar length.

VZ3000

) (Lead wire length) VZ G: 300 mm H: 600 mm VF Bracket VFR VP4 VZS VFS (Mounting hole) (Mounting screw) (Mounting hole) VS4 (PE port) VQ7 EVS VFN (Piping port) L plug connector (L) VZ3120-L-M5 M plug connector (M) VZ3120-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3120-D-M5 Built-in One-touch fittings VZ3120--C4 C6 MAX. 10 C4

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

Compact

D-M9V, D-M9WV D-M9A D-M9AV A B W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto switch model Bore size [mm] 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV D-A9m/A9mV C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL D-A5m/A6m D-A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-Y59m/Y69m D-Y7P

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Standard Combinations

for maintenance D Regulator Air filter Drain Min. clearance for maintenance D Air filter Regulator ACG20B Optional (-Y) Upward facing handle ACG30B/40B Optional (-Y) Upward facing handle A N P G E N A E G P L L B C H1 H1 H2 OUT IN OUT IN SMC SMC 2-L H2 J L M M 2-K K Port size Port size O o s S Drain Min. clearance for maintenance D Air filter Regulator Min. clearance for maintenance Drain

E-P HYREG

00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note 3) Only

JXCx-OMT0023

For manufacturer setting PD22 *DOP3 Function selection D-3 P PC17 *OSL Overspeed alarm detection level P, S, T PD23 For manufacturer setting PC18 For manufacturer setting PD24 *DOP5 Function selection D-5 P, S, T PC19 PD25 For manufacturer setting PC20 PD26 PC21 PC22 *COP1 Function selection C-1 P, S, T PC23 *COP2 Function selection C-2 S PC24 *COP3 Function selection C-3 S PC25 *COP4 Function

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Compact Cylinder

Rod end nut material: Carbon steel Surface treatment: Nickel plated 8 Series CQU Compact Cylinder: Plate Type Double Acting, Single Rod Auto Switch Proper Mounting Position (Stroke End Detection) and Its Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B A A C Hs A B Hv (mm) D-A9V D-A9 D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL A B A B Size Hv A B C A B Hs 23 Hv C Hs 20.5 20