3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5

VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

80

C R E (AC type) [mm] B B1 2 x P Port size Model One-touch fitting P B B1 C D E F VDW1 3.2, 4 31.7 17.1 46.1 15 9.5 11 VDW2 4, 6 35.9 19.8 52.9 20 10.4 13.5 Mounting bracket dimensions Electrical entry Model One-touch fitting P U W X Y Grommet Q R VDW1 3.2, 4 28 11 34 17 15.5 30.35 VDW2 4, 6 33 14 39 20 17 35 Port size M5/M6 Grommet 2 x 3.4 Mounting hole W Y X U D 300 Q F Full wave rectifier

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Series CQ2

M36 x 1.5 21 47 50 64 4 Compact Cylinder/ Double Acting: Double Rod Series CQ2W 180, 200 How to Order CQ2WB 180 180 50 50 D D C C Z76 With Auto Switch CDQ2WB With auto switch (built-in magnet) Number of auto switches 2 pcs. Nil S 1 pc. n "n" pcs.

VCW

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

LECP6_C

P DC24V (LE ) LEHZ10LK2-4AF-R16N1D 6 64 LEHZ10LK2-4 / I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> /NPNPNP LEHZ10K2-4 NPN 7 - 2.3 1 I/O LEC-CN5-* 1 PLC 3 / DC24V CN5 CN4 1 CN3 LE-C*-*-* LE-C*-* -*-S 2 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 3 DC24V USB A-miniB type <> AWG20 (0.5mm 2) USB LEC-W2

MGQ

model 100 80 63 50 40 32 25 20 16 12 D-Z7/Z80 D-Y5/Y6/Y7 11.5 10 10 9 8.5 8.5 6.5 6 6 5 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

HRX-OM-R016

Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric resistivity/conductivity

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

AS-FG/ASD-FG

4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 M5 x 0.8 6, 10, 16, 20 AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25,

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Compact Hydraulic Cylinder Series CH
KGB

MA B D-F9BAL A 32 to 100 Proper auto switch mounting positions (mm) D-Z7, D-Z8, D-Y5 D-Y6, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W B 18 21.5 26.5 31 39 46.5 A 13.5 19 19 21.5 24.5 34.5 32 40 50 63 80 100 B A D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) Bore size (mm) D-Y7BAL SMC MA SMC 32 40 50 63 80 100 33 37.5 43.5 52 62.5 75 Approx.

LEF-OM006xx

1( ) 2) -5m 5m 10% 3() 452000Hz 1 () 4 5 6 7 8 <-> LEFS 16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6

HRX-OM-R005

Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity sensor

Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.