High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

ITV

G OUT 2 22 30 R3.5 25 15 25 7 36 L-bracket INI-398-0-6 (Optional) (10) 30 45 2.3 2 x Rc1/4, 3/8, 1/2 SUP port, OUT port (7) 36 14-8-25 26 Series ITV1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications and delivery times.

Clamp Cylinder with Lock Series CLK1

3 x 38l 17 30 30 17 20 20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Profile Design ISO/VDMA Air Cylinder Series CP95

20 100 30 29 500 63 300 E: Kinetic energy [J = Nm] m:Load weight [kg] v: Piston speed [m/s] 50 200 40 100 80 32 50 30 Load [kg] 20 At the stroke end, when stopping a large amount of kinetic energy generated by a large load and high speed operation, compression of air is used to absorb the impact without transmitting vibration to the surroundings.

PFxx-OMS0001CN

Rc NPT 160 g 240 g G 170 g 245 g +80 g +25 g +30 g -67No.PF-OMS0001CN-A 1()10024 551005009.5 221002003.8 2OUT 30()90% ON(OFF) 4 5 60()90% 7 8 9 M8 ZS-40-A AWG23 0.7 mm PVC 1.1 mm PVC 4 -68No.PF-OMS0001CN-A A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min PFMC7501(500 L/min) PFMC7102(1000 L/min) kPa

CXWM/CXWL

M L CX Plate mounting style with auto switch: CDPXW S M L Table (1) DHousing mounting style with auto switch: CDBXW M -X M L Table (2) 20Data Table (1) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5

PFxx-OMJ0005CN

0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 290 L/min

125

1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] A B PE 8.25 121.9 112.1 104.9 R 3 84.5 P1 15 30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated: VEX3320 DIN terminal (D) Caution How to Use DIN Terminal Connector Refer to page 1739.

Modular Type Regulator Series AR

) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Connector specification Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 40.7 27 30 5 50 L 25.3 Socket connector Socket connector pin arrangement A-coded (Normal key) pin arrangement A-coded (Normal key) L Item Specifications Cable O.D. 6 mm Conductor nominal cross section 0.3 mm2/AWG22 Wire O.D

C76

[First angle projection] Single Knuckle Joint/DIN648 Double Knuckle Joint/DIN71751 CJ1 CJP CJ2 CM2 CG1 MB (mm) (mm) MB1 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15 a 20 24 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2

C76

Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal

VQ4000

B A 5 B A B A 6.5 L1 2 4 B A 4 B A B A 2 4 B A B A 3 B A D side 2 4 B A 2 A A 2 4 B A 1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106 10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc.

SL5200

Installation unit gauge port Pressure range Unit Regulator Code 2) Part number 3) Lower mount material Select compatible materials of construction for the gas Gas V15 V3 L 1 H V2 2 4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

Sine Rodless Cylinder Series REBR Direct Mount Type

17.5 23.5 0 L L A L 0 M2 Since there are 2 guides, the guides' central axis and the cylinder's central axis are the same.

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Low frequency operation Switch valves at least once every 30 days to prevent malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year. Back page 6