LEH_C

-4 M30.5 0.9 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6 LEHZ(J)20(L)K2-10 M50.8 3.0 8 LEHZ(J)25(L)K2-14 M61 5.0 10 LEHZ32K2-22 M61 5.0 10 LEHZ40K2-30 M81.25 12.0 14 17 - LEHF [Nm] LEHZ(J)10(L)K2-4 M30.5 0.9 LEHZ(J)16(L)K2-6 M30.5 0.9 LEHZ(J)20(L)K2-10 M40.7 1.4 LEHZ(J)25(L)K2-14 M50.8 3.0 LEHZ32K2-22 M50.8 3.0 LEHZ40K2-30 M61 5.0 [Nm] L[mm] LEHZ(J)10(L)K2-4 M40.7 1.4 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6

CE

Dimensions for auto switch model D-F79W. 10-12-25 25 Series CE1 Proper Auto Switch Mounting Position (Detection at stroke end) Auto switch A B Proper Auto Switch Mounting Position D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BAL D-F7BAVL/F79F Auto switch model D-A79W D-F7NTL D-A7 D-A80 D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

402 338 352 430 448 VVX21 VVX22 VVX23 (mm) Grommet Conduit DIN terminal Electrical entry Conduit terminal (B) Individual SUP type A B C D E F H J K M N Model Q 49 58 63 R S 42 51 56 T U 58 62 64.5 V X 62 65 68 W Y 95 98 101 VVX21 VVX22 VVX23 38 49 49 20.5 26.5 26.5 17.5 22.5 22.5 10.5 13 13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 D-XC79 Machining tapped hole, drilled hole and pin hole additionally MGF63 30, 50, 75, 100 -X MGF100 20Minimum Stroke for Auto Switch Mounting Data (mm) Applicable auto switch No. of auto switches mounted D-Z7 D-Z8 D-Y69 D-Y7V D-Y59 D-Y7 D-Y7W D-Y7BAL D-Y7WV 10 5 10 15 20 1 pc. 15 10 10 15 20 2 pcs.

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D

CE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 d Applicable bore size (mm) D C d D C B H Part no.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Table of Contents

D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style. Water Resistant 2-color Indication Type. D-F7BA(V)L Water Resistant Rail Mounting Style . D-F9BAL Water Resistant Direct Mounting Style . D-Y7BAL Water Resistant Direct Mounting Style .

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Compact Cylinder with Solenoid Valve/

D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

CP95

6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side

CP95

9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16 138 40 55 21 38 30 G 1/2 19 M10 x 1.5 8 32 5 4 17 15 51 233 320 114 89 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Courtesy of Steven Engineering, Inc.-230

Prevents Micro-Bubbles

L LQ LVN 4-M TI/ TIL K Non-locking type PA Locking type PAX 60 PB (H2) (H1) C B A E J B (F) (mm) Dimensions A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 17-5-29 27 Series LVH Dimensions/Threaded Type N Body material: Stainless steel Body

2/3 Port Valve

MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 1 4 1 2 1 1 2 VNC5-32A VNC6-40A VNC7-50A 4.2-24 VNC Port size: 32A, 40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226 250

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

3-Position Rotary Table

(V), D-M9W (V) D-A9, D-A9V Rotation Size Operating angle m Hysterisis angle Operating angle m Hysterisis angle A B A B 10 20 30 50 190 10 10 90 42 27 45 31 49 190 10 10 80 35 35 62 39 66 190 10 10 65 30 39 68 43 72 190 10 10 50 24 49 83 53 87 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy