ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Peltier-type Chiller Thermo-con/ Compact Type

D-G

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: F (G), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: G, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

JXCx-OMT0028CN

) (1-145) RESET SVON D (1-146) RESET SVON D (C24V) (1-147) RESET SVON D 63 - (1-148) RESET SVON D (1-149) RESET SVON D () (1-150) RESET SVON D (1-192) E ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

VXA31/32

22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

AMF

3B flange 40 4B flange 20 2B flange 30 3B flange 40 4B flange Vessel shape Piping support type Self-standing type 60 6B flange Model Selection Max.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

ISO Interface

C US How to order ISO 5599/2 Plug-in Manifold VV8 1 5 02 03 D T Size 1 Size 1 2 Size 2 3 Size 3 Port Thread Rc(Pt) T NPTF F G(PF) Number of Stations 1 1 Station Location of P, EA, EB port D Bottom U Top 10 10 Station Note) SU and TBU require one station.