IZx-OMT0049 ) Note 14) Note 14) Note 14) Note 14) OFF ON OFF ON Ions are generated (green) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 18) Note 15) Note 16) Note 17) Note 17) OFF ON OFF ON OFF ON Key-lock (green) KEY Note 19) Note 19) Note 19) Note 19) Note 19) OFF Generate Note 19) Note 21) Ion generating status Note 20) Note 20) Note 21) Note 21) Stop High voltage power supply module
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09
This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.
20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series
20 18 36 10 57.5 M6 x 1 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 177 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 193 202 235 14 221 20 28 22 44 14 76.5 215.7 71 83.5 M8 x 1.25 94 91 78 9 16.2 11 46 177.4 95 9 9 80 92 60 194 203 238 14 224 20 30 22 44 14 89.5 219.2 M10 x 1.5 91 84.5 97 109.5 113 107 108 DDimensions for auto
14 14 17.5 17.5 17.5 L 7.5 7.5 7.5 10.5 10.5 10.5 A A 20 A B C D E F Center Right Left Center Right Left Center type Left type 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 For Asia For North America For Europe For France Special 144 65 280.1 150.2 19 L D3 Sectional view A-A (1:1) 63 How to Order Right type CKZT63 A015 C S 47 37 Arm position 54 78 C R L Center Right Left 20 Center
B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL.
14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water
(O.D.: Within 6.2) 10 Ejector System Vacuum Unit ZK2mA Series For Manifold Ejector + With Valve + Without Energy Saving Function Refer to page 14 for How to Order Manifold.
JIS Symbol 14-15-5 2 Series HAW How to Order Precautions HAW 22 14 D Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.
Note 2) Refer to page 14-18-9 for further information of options. Note 3) Combination of L and M is not available. 14-18-6 7 The models IDF1E to 11E and IDU3E to 6E have been revised. For details, refer to catalog no. ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.
Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.
32 16 12.5 50 8 56.2 7 39 26.5 30 200 to 1000 NN P RR S U Z ZZ NA Bore size Stroke range 1 8 150 to 700 20 M20 X 1.5 9 146 14 217 226 30 1 8 1 8 1 4 150 to 700 M26 X 1.5 25 9 146 14 221 230 34.5 150 to 1000 M26 X 1.5 32 9 159 14 234 243 42.5 200 to 1000 M32 X 2 40 11 181 18 270 281 51 4.9-12 Sine Cylinder Series REC REC U/Front trunnion Width across flats B2 TDe9 -0.025 -0.061 Z 2-Rc(PT)
20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series
32 16 12.5 50 8 56.2 7 39 26.5 51 Up to 1000 NN P RR S U Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 32 M26 x 1.5 Up to 1000 1/8 9 159 14 234 243 40 M32 x 2 Up to 1000 1/4 11 181 18 270 281 Double clevis style: RECD 2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1
16.4 20.4 25.5 QW 66 98 110 NV 4.5 6.6 9 NX 7.3 10.5 14 PP 5.3 8 16 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 Model MY2HT16G MY2HT25G MY2HT40G P indicates cylinder supply ports.
ZK2-OM00201 (14) Lead wire with connector (When individual lead wire is necessary, order with the part number below.)
Bushing Oil impregnated sintered copper alloy 15 Soft wiper 16 Step motor (Servo / 24VDC) 14 - 4.
size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 R Z Y 250 to 400 14 190 129 350 to 500 207 14 146 350 to 600 14 210 146 350 to 800 15 236 191 Note) Dimensions marked with are not required for the one without rear plate. 9-4-8 9 Fine Lock Cylinder with Guide Series MLGC Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Hs CL CL1 MLGC CNG Auto switch
17 22 16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.