High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

GA1 GB1 2-Rc P Effective thread GA3 3 GB3 A K F NA H NB Air release Air release Air release S + Stroke ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

High Power Cylinder Series RHC

Contents Urethane 12 50 Piston seal RHC50-PS NBR 13 63 Wear ring RHC63-PS Resin 14 Set of nos. 12 to 16 above 80 Cylinder tube gasket RHC80-PS NBR 15 100 Rod seal RHC100-PS NBR 16 Seal kits are sets consisting of items 12 through 16, which can be ordered using the seal kit number for each bore size. 5 High Power Cylinder Series RHC Dimensions/Basic Type 20 to 40 Rc P Rc P GA H2 NN NN GB

High Power Cylinder Series RHC

Contact SMC when disassembly is required. 14 Wear ring Resin CX 15 Cylinder tube gasket NBR 16 Rod seal NBR MQ RHC RZQ D-X Individual -X 1205 Series RHC Dimensions: Basic Style 20 to 40 2 x Rc P NN GB GA H2 NN H1 MM 2 x NIf8 D NE C 1.5 1.5 Effective thread length 2 x FL AL E E Width across flats KA NF 10 10 N JD A K F N JC NA S + Stroke F H WH B ZZ + Stroke (mm) A AL B C D E F GA GB H H1

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

S Couplers Series KK/KKH/KK13

Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

•

I lube OUlslde dia. od Inch size H1 (Width across flats) H2 (Widlh across lIats) , _ l4'. W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

Prevents Micro-Bubbles

Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D

21

Bore size Stroke Foot (L): ClM3L AL A H F G G H2 H1 2 x NN (Effective thread length 2 x FL) Width across flats B1 Width across flats lNA F 2 x P MM I 2 x LC B 4 x LD Width across flats KA LH D Width across flats B2 LT LX Y X X Y LS + Stroke S + Stroke Z ZZ + Stroke LZ Foot (L) Bore size (mm) A AL B 40 B1 13 B2 26 D 8 F 13 FL 10.5 G H H1 5 H2 8 I KA LC 4 LD 6.8 LH 25 LS 95 20 25 32 40 Width

155

Pivoting Nozzle with Self-Align Fitting / KNK (mm) Model Nozzle diameter D Connection size L1 L2 With across flats H1 H2 H3 17 19 24 27 KNK-10-600 KNK-12-600 KNK-16-600 KNK-20-600 10 12 16 20 6 6 6 6 17 17 17 17 17 17 24 27 17 17 17 17 41.7 41.2 41.8 43.8 35 D H3 H1 H2 L1 L2 8.5 Pivoting Nozzle with Male Thread / KNK (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 H2

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F