3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

port} (A) 2 N.C.

Compact

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

53

Use this as a reference.

Lightweight and Compact

Use this as a reference.

CEx-OMI0064

a. b. c. 4. a. b. c. 1 - 1. 1. 1. (), 2. ,, 3. F.G.

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Suction Filter with Case FH99 Series

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

Compact manifold regulator ARM5 Series

A ARX AMR ARM ARM ARP IR-A A-A X IR IRV VEX SRH SRP SRF ITV IC ITVH ITVX PVQ Component Parts Replacement Parts Description No.

VCC

1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

model Auto switch model B 0.42 0.52 0.56 B 0.42 0.52 0.56 A 1.36 1.67 2.16 A 1.36 1.67 2.16 B 0.50 0.60 0.64 B 0.50 0.60 0.64 A 1.44 1.75 2.24 A 1.44 1.75 2.24 B 0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46

rep-modular-e

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

VCA

Description Material q w e r t Solenoid coil IN Armature assembly Stainless steel, HNBR, PPS Return spring Stainless steel O-ring HNBR Body Aluminum Bracket Assembly Dimensions J 1.5 A C 4-6 B D Valve mounting screws 2-H Valve mounting hole Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D H J Assembly part no.

VEX1

X Tank capacity 1000 Relief time that is read t = 2000 1000 = X 23 = 46 The result is 46S. From the above, the relief time is 263=23S 5.1-5 VEX1 Construction/Operation Principles/Component Parts [1] When A port pressure is high. [3] When A port pressure is low.

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)