High Vacuum L Type Valve

E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11

Card Motor

DRIVE DRIVE A6 A6 SVON SVON A7 A7 Internal resistance 10 [k] Internal resistance 10 [k] NC NC A8 A8 2 mA or more is needed for the input to be ON. 2 mA or more is needed for the input to be ON.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

has an effective area approximately 20% smaller.

Pin Cylinders Series CJP2/CJP

It may vary substantially depending on an ambient environment.

High Vacuum L Type Valve

flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6

CE2

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

CE2

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

High Vacuum L Type Valve

flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6

KG

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

Parallel Style Air Gripper: Wide Type Series MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

Digital Flow Switch

Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead wire with M8 connector (ZS-40-A) -72No.PF-OMS0002-B Revision history A: Contents revised in several places.

CL

14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

0.

Manual Override How to Use L/M-Type Plug Connector Caution Caution Without an electric signal for the solenoid valve the manual override is used for switching the main valve. Push type is standard. Locking type (Tool required) is available as an option. 1.

•

Unit 'k,gf Bore(mm) 40 50 53 IBasic weight 0.74 0.96 1.23 Cylinder ~ II / E E I Add itional weight per 25 stroke 0.10 0. 11 0.13 <100 // Single knuckle jOint 0.2 J> "V Double knuckle joint(With pin) 0.28 ~ ~ ~ 300 Limit switch mount 0.22 /~/ c E m Cam 0.12 Ii: 200 Special bracket 0.2 ~V Calculation method _ BaSIC weight . . ... . . 0.74 (40) 100 W :/ Example : CKI ()40-IOOY _ Additional

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Guide Table Series MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places

Rotary Gripper Series MRHQ

0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.5MPa 0.6MPa, 0.7MPa 20 20 0.6MPa 0.6MPa 0.6MPa 10

3

In the case of obtaining an accurate flow rate, refer to pages 227 and 228.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.