Mini Free Mount Cylinder

3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

ISG

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

KB

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions

Nozzle Type Ionizer

Before wiring, ensure that the power supply capacity is enough and that the voltage is within the specification. 7. Do not allow foreign matter or tools to enter the nozzle. The inside of the nozzle contains emitters.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 AD-CHN-40 M5 Y-shaped double knuckle joint Bracket pin 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 Material: Carbon steel Material: Rolled steel plate Material: Cast iron RR1 2-D drill through RR1 C1 Chamfer Cf7 NDH10 NDH10 MM C1 Chamfer E1 E1 B NZ NZ NX A NX U1 A1 A1 U1 L1 L1 Part no.

PC Wiring System

, also refer to the common specifications on page 7 in CAT.E02-20.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

LEC-OM069xx

Monitor Displays.7-2 7.1 Monitor Displays.7-2 7.1.1 System Monitor.7-2 7.1.2 Status Monitor.7-2 7.1.3 Motion Monitor.7-2 7.1.4 Input Signal Monitor.7-2 7.1.5 Output Signal Monitor.7-3 8.

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

It is already built-in to the rectifier circuit. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)