ZQ-OM01401

0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)()

IDX-OM-W023

(Ex.) 1. 2. 3. 4. 14-2 IDU8E/11E/15E1-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30 IDU Series 141 IDX-OM-W023 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 142 IDX-OM-W023 15 15 15-1 / IDU Series 15-1 A2020/1 B2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

ARJ310

ARJF310F-01 y e !

ARJ1020F

ARJF310F-01 y e !

Miniature Regulator Series ARJ310

ARJF310F-01 y e !

PF-OMN0011_C

) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

PSxx-OMS0006CN

N01 C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L

JXCx-OMT0028CN

JXC-OMT0028CN (GW)(EtherNet/IP) / LEC-GEN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2)GW . 8 (3)LEC . 8 (4)GW . 8 (5)GW . 8 (6) . 9 (7) . 9 3 . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGEN1) . 13 (2)DIN (LECGEN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3

Speed Controller: Standard Type Series AS In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-28 2 Speed Controller: Standard Type In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Effective

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Air Pilot Operated

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Air Pilot Operated Series NVSA

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Quick Exhaust Valve Series AQ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-12-1 2 Series AQ Construction AQ1500/1510 AQ2000/3000/5000 Component Parts Material/Model No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

4

Exhaust port type 2 3 Common exhaust Individual exhaust Ordering example: VV307-01-052-01-F 1 pc. (5 station manifolds base) VO307-1G14 pcs. DXT060-51-13A1 pc.