3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

ZX

Table (2) Valve Unit/Valve Plug Connector Assembly Table (3) Vacuum Switch/Plug Connector Assembly How to order If ordering vacuum module with 600 m or the longer lead wire, specify both vacuum module and connector assembly part numbers.

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

MXS

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

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(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

NVZseies

Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

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N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

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(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 2.35 mm 2.35 mm Rated current 10 A 8 A Rated voltage 600 V 600 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.4 kV Rating/Performance Ambient temperature Connector 25 to 80C Cable 30 to +105C 10 to +105C Min. bending radius (Fixed) 94 mm 110 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Also when exceeding a 600 mm stroke, specify -XB11 at the end of the part number. (Except 10) Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

3 Port Solenoid Valve/

10% Power consumption 0.45 W Surge voltage suppressor Varistor Indicator LED Manufacturer OMRON Rockwell Automation Electrical wiring G1/2, M12 connector M12 connector Contact resistance 25 m or less 50 m or less Min. applicable load 5 VDC, 1 mA (Load resistance) 5 VDC, 5 mA (Load resistance) Max. voltage 24 VDC Max. load current 50 mA Max. load inductance 0.5 H Insulation voltage 300 V 600

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Booster Regulator/Air Tank

VBA2A: Qb = 600 [L/min (ANR)] VBA4A: Qb = 1050 [L/min (ANR)] Refer to Flow Rate Characteristics on pages 1012 and 1013. Avoid pulsation. (Max. 0.05 MPa) NO: Need no tank The VBA4A can supply necessary pressure. NO Judgement of flow rate YES YES The VBA2A cannot obtain necessary pressure. Select the tank from table below.

C92

Bore size (mm) Standard stroke (mm) Bore size (mm) Rod diameter (mm2) 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 32 675 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1082 40 40 1651 50 2804 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 50 Theoretical force (N) = Pressure (MPa) X Piston area (mm2) 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 Intermediate

Booster Regulator/Air Tank

VBA2lA: Qb = 600 [L/min (ANR)] VBA4lA: Qb = 1050 [L/min (ANR)] Refer to Flow-rate Characteristics on pages 3 and 4. Avoid pulsation. (Max. 0.05 MPa) NO: Need no tank The VBA4lA can supply necessary pressure. NO Judgement of flow rate YES YES The VBA2lA cannot obtain necessary pressure. Select the tank from table below.

2-Color Display

Min. load impedance: 50 Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 The FUNC terminal is connected using a dedicated lead wire (ZS-38-5L or ZS-38-U) when the copy function is used.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.