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P Signals and terminal status can be monitored. P Parameters can be set.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Possible to transfer a workpiece at low-speed.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

ZQ-OM01601

[F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L

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type F Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

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L Foot V F Rod flange2 V4 V G Head flange2 V5 D Double clevis3 V 1 Mounting bracket is shipped together, (but not assembled). 2 For horizontal cantilever mounting with the ends tapped, rod flange and head flange, use the actuator within the following stroke range.

HRL

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port Pilot port F K A B A B SMC SMC J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

CE

P-67.5 (YG)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

energy saving effect

V: Power supply voltage Power consumption P: 20 [kW] Q = P = 20 [kW] P Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = 24 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

AC Servo Motor Driver (CC-Link Type)

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -74- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.

AC Servo Motor Driver (CC-Link Type)

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -79- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.