Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 75, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 75, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 80, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 100, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max.

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 100, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max.

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 125, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 125, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 150, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

Operation Method: Straight Advancing Stroke, Cylinder Diameter(Ø): 50, Stroke S(mm): 150, Support Type: Clevis, Rod Tip Shape: [Others] Clevis Type, Clamping Force(kN): 0.98, Max. Pressure(MPa): 1, Additional Function: No (Standard), Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～70, Auto Switches: Without auto switch / without switch mounting rod, Lead Wire Length

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

ISO Cylinder

M A B C D E F G H Max. screw-in depth P Allowable eccentricity U Max. operating tension and compression power [kN] Nominal thread dia.

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

AC Servo Motor Driver (MECHATROLINK-III type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

CLQ

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V Approx.

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.