Steam Valve

33.3 2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105

High Vacuum Angle Valve

of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M4 x 0.7 Model A 40 ZPX40HJ25-01-A18 D 151 40 ZPX40HJ50-01-A18 42 135 186 B 42 C 100 A B C D E F G H Y 63 65 14.5 26 41 63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105

Table of Contents

How to Order . 74 75 77 77 78 81 82 82 83 83 83 83 83 84 84 84 85 85 85 85 85 86 86 86 86 86 87 88 89 89 90 90 91 92 92 93 93 94 95 96 97 99 99 99 99 101 102 104 104 104 105 107 108 110 110 110 110 112 113 115 115 115 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

RSQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A 4-9 through 38 + Stroke 67 + Stroke 105 + 2 stroke B Built-in One-touch fittings QB QA Tubing O.D. Stroke QV 11 Note 1) Body dimensions without auto switch are the same as drawing above.

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CXT

46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411 22 122 17 2 127 32.5 11 5.5 PA dimension is the center sorted factor of the L dimension.

CXWM/CXWL

through 2 x 2-11 counterbore depth 6.5 (8H7 hole pitch) 8H7 depth 6 +0.015 0 4 positions for set screws for fixing shock absorbers (M5) 4-M8 x 1.25 thread depth 15 +0.012 0 8H7 depth 12 (mm) 2-Rc 1/8 Plug (R 1/8) (Cylinder port) Model ZZ 254 304 354 404 454 504 554 Z 214 264 314 364 414 464 514 SS 162 187 212 237 262 287 312 S 52 77 102 127 152 177 202 Q 234 284 334 384 434 484 534 P 80 105

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Y + Stroke X Bearing type Mounting style Bore size Stroke 20-MGG Y X Bore size (mm) Q 86(94) 32 39 25 Copper-free 96(105) 40 46 29 Specifications 109(121) 50 57 31 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 112(124) 63 56 34 Action Double acting 137(151) 80 68 46 Fluid Air 138(152) 100 68 47 Maximum operating pressure 1.0 MPa ( ): Denotes the dimensions for long stroke.

MLGC

Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30 160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

-13 13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52 70 88 105

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

CY Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXPJ6 MXPJ6-10 5, 10 105 Stroke length tolerance 8-8-8 8 Precision Air Slide Table Series MXP Specifications MXP6 Model MXP6 6 MXP10 10 MXP12 12 MXP16 Bore size (mm) 16 Piping port size M5 x 0.8 M3 x 0.5 Fluid Air Action Double acting Operating pressure 0.15 to 0.7 MPa MXP10 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature MX 50 to 500 mm/s (Adjuster option/Metal stopper: 50

Compact Cylinder

467 488 509 530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105

Magnetic Separator FHM Series

Nominal Filtration Hydraulic Fluid m 3 5 10 20 40 74 105 149 270 Symbol (1) 003 005 010 020 040 074 105 149 270 Symbol (2) Type N Petroleum W Water-glycol, Emulsion V Phosphoric ester 528 A FH Series Microswitch for Differential Pressure Indication Switch (1) Contact specifications (4) Electric circuit Table 1 Contact specifications NC Item Specifications Inrush current Max. 15 A NO 5 VDC

Thermo-chiller/Rack Mount Type

Water-cooled Refrigeration HRR050-W-20 440 (Includes protruding parts) Communication connector 2 24 550 50 Operation display Internal unit fan Power supply switch Power supply connector Communication connector 1 Fluid level gauge Circulating fluid fill port 10 Cover panel Circulating fluid return port Rc1/2 494.7 7 Facility water outlet Rc3/8 Handle 348.7 532 527 211 385 183.6 105 39 0 37.5

HRS100/150

Page 105 ySnow Protection Hood . Page 116 Dimensions . Page 106 uParticle Filter Set . Page 117 Recommended External Piping Flow . Page 108 iWired remote controller . Page 117-1 Cable Specifications . Page 108 Operation Display Panel . Page 109 Cooling Capacity Calculation List of Function . Page 109 Required Cooling Capacity Calculation . Page 118 Alarm .