CLA

. . n~.a 12...

e-Rodless Actuator

Once in the mounting position, use a flat head watchmakers screwdriver to tighten the included set screw. Note) When tightening the set screw, use a watchmakers' screwdriver with a handle diameter of about 5 to 6 mm.

20

[mm] [mm] A Note) A Note) Type Symbol Nozzle part no.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P/A as a contact protection box may be necessary.

Multi-Axis Step Motor Controller

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.

Water-cooledThermo-chiller

Flourinert is a trademark of 3M. GALDEN is a registered trademark of Solvay Solexis, Inc.

25

Diaphragm Assembled in a clean room.

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

High Vacuum L Type Valve

Disassembly procedure Step 1 Step 2 Bolt b 3 1 2 O-ring 4 Handle assembly Bottom surface of groove to discharge gas Bolt a Body Cover Heater The heater is removed by loosening Bolt a. Bolt a is behind the Cover. Remove the Cover using a watchmaker's screwdriver. Loosen the Bolt b gradually with the valve opened a little in numerical order.

CV/MVGQ

' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.

MLGC

Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 A linear transfer cylinder unit with a built-in locking mechanism and a guide rod integrated in a compact design.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

MA a A MA a Air release R (max.)

MLGC

1 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 A linear transfer cylinder unit with a built-in locking mechanism and a guide rod integrated in a compact design. CL CL1 MLGC CNG MNB CNA CNS CLS CLQ MLGP RLQ MLU ML1C High level of stopping accuracy D-X Locking method Spring locking Pneumatic locking Spring and pneumatic locking 20Locking in both directions is possible.

CV/MVGQ

A selection of solenoid valves is possible.

Moisture Control Tube

1000 0 0 200 400 600 800 1000 Kv value Volume ratio (Kv) (2) If your operating conditions are different from these basic conditions, apply a correction factor.

Tamper Proof and Flat Head Screw

be adjusted with a flat head screw driver Prevents inadvertant manual operation SMC Pneumatics, Inc.

CG1

HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5

VEA

If there is a significant amount of noise (ripple) from the power supply, provide noise protection such as a noise filter or a Z-wrap.