CYPSeries

x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Inch-size One-touch fittings and NPT/NPTF/G threads are available.

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

Digital Gap Checker

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

1

D-G

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Clean Room Rodless Cylinder Series CYP ø15, ø32

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

MHL2

J dimension is different from the value which is subtracted stroke from G dimension.

Air Slide Table Series MXP

Applied unit Contents 8 GR-S-005 (5 g) MXP8-PS 10 GR-S-010 (10 g) MXP10-PS Guide unit 2 pieces of no. !8 and !

VR4151/4152

Frequency Port size Piston style 0.15 to 1.0 MPa 5 to 60C (No freezing) Red Green Orange Rc 40 g 300 c.p.m. or less R 1 8 1 8 Weight 6 g Construction Construction Clear cover Colored piston Colored piston (Red, Green) No.

Parallel Style Air Gripper: Wide Type Series MHL2

F G H 110 158 202 Model MHL2-32D MHL2-32D1 MHL2-32D2 60 108 152 150 198 242 220 318 402 86 134 178 272 370 454 56 104 148 DNote 1) J dimension is at fully closed.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT661-12A VQ VQZ Pilot valve assembly VZ VQ11 5 G 1 VS Series VQZ100 0 VQZ200, 300 1 Function Symbol Specification DC (1.0W) AC Standard High pressure (Metal seal only) (1.0W) (1) K Electric entry (0.5W) Y Low wattage Light and surge voltage suppressor Without Electrical entry Symbol (1.0W) Latching (3) L G L LO M MO Y YO YZ YOS Grommet (DC specification) L plug connector with lead wire

Process Pump

7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Width across flats G MM MM R (max.)

HRX-OM-X084

Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Precision Regulator Series IR1000/2000/3000

eInterface rInterface with bracket 231 180 128 OUT 2 G G 2 OUT 2 OUT EXH 3 97 133 169 G 30.2 wAFM20 40.7 wAFM30 qAF20 qAF30 50 qAF40 wAFM40 IR200--X120 IR100--X120 IR300--X120 Accessory (Option)/Part No. Part no.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

MXW

( g ) Model Standard stroke (mm) 25 50 125 100 75 300 275 150 175 200 250 225 MXW8 550 610 880 790 700 980 MXW12 930 1270 1140 1010 1400 MXW16 2150 1970 1850 2350 2540 2740 MXW20 4640 4440 5000 5360 5710 6430 6070 MXW25 9620 9300 12800 13400 9970 10500 11100 12200 11700 D-X Individual -X 151