Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Modular F.R.L. Units

Nr c Pressure unit of the scale plate Nil MPa P2 MPa/psi dual scale + Center of F.R.L. body D A d Mounting position Nil Right R Left Model 1 Port size A B C D E Applicable model IS10E-20l01-A 1/8 29.8 66.3 55.3 28 16 AC20l-B IS10E-20l02-A 1/4 IS10E-20l03-A 3/8 IS10E-30l02-A 1/4 31.8 72.8 58.8 30 13 AC25l-B, AC30l-B IS10E-30l03-A 3/8 IS10E-30l04-A 1/2 IS10E-40l02-A 1/4 1 Set pressure range

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Refrigerated Air Dryers

Refrigerant R407C (HFC) IDF F IDF-TR 2 C B Refrigerant R407C (HFC) IDF D D A E 4 x 6.5 x 12 Long hole Specifications/Dimensions [mm] Part no.

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

LJ1H

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Modular F.R.L. Unit

D E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

AC

AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

MY1

D A B MTS Side support B MY-SB MY CY 2-J MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200

Table of Contents

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

for LECA6: LEC-D-1-2 Terminal name Function Details Accessory 0V Common supply () M 24V terminal/C 24V terminal/EMG terminal/BK RLS terminal are common ().

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

CHKD/CHKG

Mounting bolt D C CHQ CHK CHK C Model Mounting bolt part no. C Model D D Mounting bolt part no.

Proposals for Energy Saving

Stroke Refer to the catalog "Precision Cylinder Series MTS" CAT.ES20-127 C for details. 17 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Free Mount Cylinder for Vacuum Air Blow Series ZCUK How to Order C 16 ZCUK D 20 Basic type C S D 16 D 20 ZC UK A90 With auto switch Built-in magnet Number of auto switches Nil 2 pcs.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.