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bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Refrigerated Air Dryer

AMD AMH Data A: Inlet Air Temperature Data B: Ambient Temperature Data C: Inlet Air Pressure AME Inlet air temperature Ambient temperature Inlet air pressure MPa psi Correction factor F C Correction factor AMF Correction factor IDFB3E to 37E IDFB55E, 75E 1.31 F C 77 90 95 100 104 25 32 35 37.8 40 75 100 110 120 125 150 175 200 232 0.53 0.70 0.76 0.83 0.86 1.03 1.21 1.38 1.60 1.24 0.95 ZFC

Thermo-con/Rack Mount Type

External temperature sensor connector/Alarm output connector D-sub 15 pin (socket) Holding screw: M2.6 Pin no. Signal contents HECR008 HECR010 N 100-240 VAC 200-240 VAC L 100-240 VAC 200-240 VAC E PE PE N L 8 7 6 5 4 3 2 Pin no.

Microspeed Cylinder

Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches

A

COMBINATION UNITS MODULAR TYPE (N)AC1000(N)AC6000 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge H O W T O O R D E R FILTER/REGULATOR/LUBRICATOR (N)AC 00 G T E C H N I C A L SPECIFICATIONS D R A I N Manual drain D Auto drain Japanese N North American Model NAC1000 NAC2000 NAC3000 NAC4000 NAC5000

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit

Air Slide Table Series MXW

(V), D-M9N (V), D-M9P (V) 2-Color Indication Solid State Auto Switch: D-M9BW (V), D-M9NW (V), D-M9PW (V) Stroke (mm) Model 175 150 25 125 200 225 250 275 300 50 75 100 A 23.5 48.5 23.5 27.5 23.5 23.5 B 204.5 83.5 179.5 104.5 129.5 154.5 MXW8 W 11.5 36.5 11.5 15.5 11.5 11.5 V 216.5 95.5 191.5 116.5 141.5 166.5 A 27 27 47 27 27 B 203 178 108 128 153 MXW12 W 15 15 35 15 15 V 215 190 120 140

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

DOC1023126

Position loop P constant A 150 100 1 to 200 B 150 100 C 90 100 H 130 140 Sets the speed loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Speed loop P constant A 130 140 1 to 200 B 140 100 C 130 120 H 80 100 Sets the speed loop I constant.

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

ZP

N 10 D Model A B C D E Y q Pad dia.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

21

C D d H B Part no. SN-020B SN-032B SN-040B Applicable bore size 20 25, 32 40 26 30 25.5 M20 x 1.5 8 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 Trunnion Nut (mm) Pivoting Clevis Bracket Pin (For CM3E) (mm) Material: Iron Material: Iron H B d D m m l C D t t L d C D d H B Part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Inch Threads Bore size (mm) Bore size (mm) 12 16 20 25 Dd9 (inch) l d d H B C Part No.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Applicable Auto Switch Model

H HW C 44 52 64 78 92 H' T T' Z Actuator series 50 63 80 100 D-A3lC-4, D-A44C-4 D-A3lC-5, D-A44C-5 D-A3lC-6, D-A44C-6 D-A3lC-8, D-A44C-8 D-A3lC-10, D-A44C-10 58(67.5) 50.5(60) CDA1, CDBA1, CDV3, CDVS, CDLA, CDL1, CNA 69 77 91 107 121 6.5 6.5 7.5 9.5 9.5 40 50 63 80 100 7.5 8.5 10.5 12.5 15.5 M5 X 0.8 X 16 9 10 11 11 11 59(68.5) 51.5(61) 61.5(71) 53(62.5) M5 X 0.8 X 20 65(74.5) 54.5(64) Note

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating

MTS

-X 20Hv Data Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F8 D-F9W A B Hv D-F9WV A B C A B Hv A B C A B Hv A B Hv A B C 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Auto Switch Mounting Stroke for 8 Stroke (mm) Note Applicable auto switch Mounting condition Piping direction

Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.