LFE

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs. Approx. 70 g 3

Fieldbus system CC-Link compatible SI unit

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

(N)CQ2

Order them separately referring to Mounting Bolt for C(D)Q2B on pages 156 and 157. Large bore Note 8) Air-hydro not available with non-rotating rod (K). Note 7) Note 7) Stroke standard (pneumatic) Long stroke 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Bore 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 7) Only CQ2 is available with 180 and 200 bores.

Return Filter FH100 Series

(34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Pressure Sensor for General Fluids

D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0005-E Revision history A: Contents are added. B: Contents are added. C: Contents revised in several places. D: Contents revised in several places. E: Contents revised in several places.

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

CRB1/Size: 10, 15, 20, 30

Vane style S D Single vane Double vane Size 10 15 20 30 Rotation angle Application Symbol Rotaion angle 90 180 270 90 100 90 180 270 90 100 Single vane Double vane Flange Brackets Part No. (Refer to p.1.1-6 for further information on specifications.) Ass'y part No.

pa

D (for PA3000 automatically operated type) Discharge rate 5 0.040 125 (cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 100,000,000 1 1 = x x 125 60 8 1666 days = 17-5-145 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Thermo-chiller Series HRZ Fluorinated Fluid Type

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Bore sizes 32 to 63 are available for the D-P3DWA. Since there are other applicable auto switches than listed, refer to page 515 for details. For details about auto switches with pre-wired connector, refer to pages 1192 and 1193.

MVGQ

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

°C, Valve, Single, Non Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb

CLJ2

Bore size Lock operation 16 16 mm Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Standard stroke (mm) Port location on head cover Nil R Perpendicular to axis Axial direction Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, G40, 175 lb

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, G40, 175 lb

°C, Valve, Single, Non Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb

Lock: W/out Lock, Mounting Surface: D (90° Counter Clockwise from Port Side), Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (90° Counter Clockwise from Port Side), Clamping Height: L (Low Type), Auto Switch: W/out Auto Switch (Built-in Magnet), Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb