3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Be careful that the outer insulation of the lead wires does not interfere with the socket contact part. q Loosen the top screw and remove the connector housing from the terminal spades on the solenoid. w Remove the housing screw and insert a screwdriver into the slot area on the underside of the DIN cap and carefully separate block and housing. e Loosen the terminal screws of the block and

Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry Without Buffer Series ZPT Specifications Vertical Vacuum entry direction Mounting Connection Male thread Female thread Thread ø40, ø50 M14 x 1 M8 x 1.25, M10 x 1.5 dia. ø63, ø80 M16 x 1.5 M8 x 1.25,

Symbol 40, 50 40 50 40 50 63, 80 100, 125 Rc1/8 NPT1/8 NPFT1/8 Rc1/8 NPT1/8 NPFT1/8 M8 x 1.25 M10 x 1.5 M12 x 1.75 M16 x 1.5 A14 A14N A14F A16 A16N A16F B8 B10 B12 B16 63 63 M14 x 1 80 80 Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Fomulae L1 = 10.5n + 45.5 L2 = 10.5n + 63 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 66.5 84 112.5 123 77 94.5 125 135.5 87.5 105 125 135.5 98 115.5 137.5 148 108.5 126 150 160.5 119 136.5 162.5 173 129.5 147 175 185.5 140 157.5 187.5 198 150.5 168 187.5 198 161 178.5 200 210.5 171.5 189 212.5 223 182 199.5 225 235.5 192.5 210 237.5

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.

Low Profile Slide Table Series MXF

2 r w e !0 o !9 !8 i !5 u !7 q !

Multistage Ejector (N)ZL Series

EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)ZL212-EE (ZSE4E) (2) (1.6) 4-M5 x 0.8 Thread depth 6 (mounting hole) 73 87 12

No more element replacement!

e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53 DRAIN G1/4 Note Component Parts Dimensions (mm) A B Model Bore size (Nominal size B) No.

AS

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Compact Cylinder with Air Cushion and Lock Series RLQ

D-X Individual -X 857 Series RLQ Simple Joint: 32 to 63 Type A Mounting Bracket Type A Mounting Bracket 2 x D T1 T2 M W V U Joint F B E Material: Chromium molybdenum steel (mm) Joint and Mounting Bracket (Type A, Type B) Part No. Bore size (mm) 32, 40 50, 63 B D E F M T1 T2 Part No.

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

HRX-OM-S004

Ventilation (H/X inlet) Ball tap Expansion TS E Circulating fluid return port valve A Level switch Expansion Fluid level gauge valve B Customer's E machine Temp. sensor (Ref. discharge (Heat load) Press. sensor (Outlet) TS PS TS Heat Temp. sensor Circulating fluid outlet port exchanger (Outlet) Press. sensor (Ref. low press.)

Standby Regulator

DOC1018957-1 PRODUCT NAME Standby Regulator MODEL / Series / Product Number AR20S-(F,N)02E-Y(Z)-15V(E) AR30S-(F,N)03E-Y(Z)-15V(E) AR40S-(F,N)04E-Y(Z)-15V(E) AR50S-(F,N)10E-Y(Z)-15V(E) Contents Page 1. Safety Instructions 2-9 2. Application 10 3. Standard Specifications 10 4. How to Order 11 5. Structural Drawing and Replacement Parts 12 6. Operation and Adjustment 13-14 7.

Soft Start-up Valve AV2000/3000/4000/5000 1

-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

VR4151/4152

8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port !4 !3 w !2 !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Air cylinder

(Same side) 90+55(n4)/2 n=4, 8, 12, 16 100+55(n4)/2 n=4, 8, 12, 16 110+55(n4)/2 n=4, 8, 12, 16 115+55(n4)/2 n=4, 8, 12, 16 95 1 switch 90 100 110 115 105 2 switches (Different side, Same side) 100 110 120 125 105+55(n4)/2 n=4, 8, 12, 16 125+55(n4)/2 n=4, 8, 12, 16 Other qty.

PFxx-OMJ0005CN

g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L

LEC-OM005xx

How-to-Order L E C T 1 E G S Electri Enable switch*1 actuator Nil Without enable switch Controller relatio S With enable switch Teaching Box With stop switch Initial displayed language*2 E English*2 J Japanese*2 Cable length 3m *1 When a teaching box with enable switch is selected, it is necessary to activate the enable switch to change the default parameter setting of the controller..

Water-cooledThermo-chiller

Regarding the water quality standards for facility water, refer to Temperature Control Equipment Precautions. 125