Magnet: Built-in Magnet, Mounting: Double Clevis, Tube Material: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 600mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Tube Material: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 600mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

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9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

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9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

VQ5000

metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

ML1

7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Low Differential Pressure Sensor

Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PSE550/300

L C Note) The connector is unassembled in the factory, but is included with the shipment.

HRX-OM-O021

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

HRX-OM-R005

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

PSxx-OML0002CN

C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U

NVZseies

Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.