Table of Contents

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

ML1

Refer to p.0-44 to 0-46 for common precautions of auto switch.

ZPT/ZPX

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

IR1000/2000/3000

0 !1 !2 !3 !4 !

05-hyq-e

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2) CYV32 (M3) 0.05 0.05 0.05 Deflection (mm) Deflection (mm) Deflection (mm) 0.04 0.04 0.04 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.5 1 1.5 2 0 0.5 1 1.5 2 0 0.5 1 1.5 2 0 Moment (Nm) Moment (Nm) Moment (Nm) Intermediate Stop Vertical Operation When using in vertical operation, prevention of workpiece

CG1

Max. operating pressure 0.05MPa Min. operating pressure CJ1 Without auto switch: 10 to +70C (No freezing) Ambient and fluid temperature With auto switch: 10 to +60C (No freezing) CJP Piston speed 50 to 700mm/s 50 to 1000mm/s +1.4 0 CJ2 Up to 1000 mm +1.8 0 +1.4 0 +1.8 0 Stroke tolerance Up to 1000 mm, Up to 1200 mm Up to 1500 mm CM2 JIS class 2 Thread tolerance Rubber bumper/Air cushion Cushion

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29

Series PF2W Digital Flow Switch For Water

to 1 MPa 1.5 MPa Static Electricity Elimination Equipment Reduced-wiring Fieldbus System Operating fluid temperature 0 to 50C 0 to 50C Accuracy Note 1) 5% F.S. 3% F.S. 1% F.S.

ML1C

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

HRX-OM-W038

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

MQQ

Dimensions Double clevis type/MQMLD 6, 10, 16 (integrated type) +0.030 0 CDH9 Z + Stroke R Clevis pin (CDd9 ) S + Stroke -0.030 -0.060 U H BB NB CX +0.1 0 GB T-bracket Refer to page 18 for details.

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

Rodless Cylinder for Vacuum Series CYV ø15, ø32

#7 #5 @9 #0 !

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

CP95

7 to @0 and @2. Seal kits consist of items !

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Table of Contents

0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer

5 Port Solenoid Valve Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details