Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2) CYV32 (M3) 0.05 0.05 0.05 Deflection (mm) Deflection (mm) Deflection (mm) 0.04 0.04 0.04 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.5 1 1.5 2 0 0.5 1 1.5 2 0 0.5 1 1.5 2 0 Moment (Nm) Moment (Nm) Moment (Nm) Intermediate Stop Vertical Operation When using in vertical operation, prevention of workpiece

CG1

Max. operating pressure 0.05MPa Min. operating pressure CJ1 Without auto switch: 10 to +70C (No freezing) Ambient and fluid temperature With auto switch: 10 to +60C (No freezing) CJP Piston speed 50 to 700mm/s 50 to 1000mm/s +1.4 0 CJ2 Up to 1000 mm +1.8 0 +1.4 0 +1.8 0 Stroke tolerance Up to 1000 mm, Up to 1200 mm Up to 1500 mm CM2 JIS class 2 Thread tolerance Rubber bumper/Air cushion Cushion

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29

Series PF2W Digital Flow Switch For Water

to 1 MPa 1.5 MPa Static Electricity Elimination Equipment Reduced-wiring Fieldbus System Operating fluid temperature 0 to 50C 0 to 50C Accuracy Note 1) 5% F.S. 3% F.S. 1% F.S.

ML1C

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

HRX-OM-W038

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

MQQ

Dimensions Double clevis type/MQMLD 6, 10, 16 (integrated type) +0.030 0 CDH9 Z + Stroke R Clevis pin (CDd9 ) S + Stroke -0.030 -0.060 U H BB NB CX +0.1 0 GB T-bracket Refer to page 18 for details.

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

Rodless Cylinder for Vacuum Series CYV ø15, ø32

#7 #5 @9 #0 !

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

CP95

7 to @0 and @2. Seal kits consist of items !

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Table of Contents

0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer

5 Port Solenoid Valve Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

PSE200

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 x 0.8 Options Sensor cable (3m) + Connector (1 pc.)

MGZ Series

based on vertical mounting and speed of 500mm/s.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge

INFORMATION Step Motor Controller 5 types of communication protocols New New

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE