Cylinder with Lock

#3 #4 o q $6 y @8 #6 e t u i !

Series 10-, 21- AW-B Filter Regulator

R.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

IDX-OM-W025

IDX-OM-W025-A PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDF22E-20(-A,C,K,L,M,R,T) IDF22E-30(-A,C,K,L,M,R,T) IDF37E-20(-A,C,K,L,M,R,T) IDF37E-30(-A,C,K,L,M,R,T) IDF55E-30(-A,C,L,M,R,T) IDF75E-30(-A,C,L,M,R,T) Please read this manual prior of using the air dryer. Keep the manual readily available for reference. To Customers Thanks for purchasing SMC Refrigerated Air Dryer.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

E-P HYREG

00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Industrial Filters

4Washer Nut kit q, w, e, r: 1 pc. each FGDT !5Spring FGDF DRAIN 03 FGD-CV005-04 06 !6Seal FGDT/F Replacement cover !7Plug t 03 FGD-CV006-04 06 FGDC/E Parts descriptions and functions FGD-OP001 KT-FGDC KT-FGDE KT-FGDT KT-FGDF FGD-CA002 FGD-CA003 FGD-CA004 FGD-CA005 Joint !0 FGDl (Figure shows the product with two FGDB elements.)

Refrigerated Air Dryer

1 (male) R 11/2 (male) NPT 1 (male) NPT 11/2 (male) NPT 2 (male) Thread symbol and size AMG Symbol Nil R 2 (male) Symbol N 3/8 inch Drain tube O.D.

CM2

w e r t y u i o !

VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Oil Filter FH150 Series

Precautions FH150-02 to 04 q Mounting Confirm IN and OUT before mounting.

PA300/500/700

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 86.3 78.3 2(A) 2(A) 63 19 (A port) Rc 1/2 Individual exhaust: VV3PA7-42Station 3-04 (R port) Rc 1/2 34 3(R) 3(R) PA NO NC 112 (Mounting hole) 2-8.5 40 PA 52 119.5 112.5 86 1(P) 119.5 24 52 PA (P port) Rc 1/2 (Pitch) 41 37 (PA port) Rc 1/8 112.8 8 L2 L1 (PA port) Rc 1/8 PA 86.3 78.3 2(A) 2(A) 63 19 Rc

VCB

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

AC Servo Motor Driver (Network card type ）

Zero speed detection ZSP ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC07]. OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.