e

20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25 10 10

CV/MVGQ

61 20 Dd9 Rod End Nut Material: Carbon steel Applicable bore size (mm) Clevis 40 50 63 80 100 d (Drill through) Applicable cotter pin l L m Part no.

Aluminum High Vacuum Angle Valve

M10, L = 20 Refer to part no.

Support Guide/11-LEFG Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

Auto Switch Guide

M5 x 0.8 x 16 l 1.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Title not found

Reter to catatog E20-92F SoIder 3 Control p.il angle comr c 2 5 e 2 0 .-,l' :r:. ii::i-,:.:!:..1 : 4 0 0 . 1 > -90 . : : , ' : r ' ] t r , , l L : l l . l l P N 1 N E G c o P 1 2 Maximum number ot stations 20 Also available SY manifold with gateway type Sl unit and is capable to handle 128 UO points.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

clevis (C) Double clevis (D) CD [mm] Bore size [mm] EW CD H9 L MR XD UB h14 CB H14 EB 32 260.2 0.6 10 12 9.5 142 45 26 65 40 280.2 0.6 12 15 12 160 52 28 75 50 320.2 0.6 12 15 12 170 60 32 80 63 400.2 0.6 16 20 16 190 70 40 90 80 500.2 0.6 16 20 16 210 90 50 110 100 600.2 0.6 20 25 20 230 110 60 140 XD + Stroke L MR EW Single clevis (C) EB UB CB Double clevis (D) 136 CP96 Series Accessories

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

mA 4 mA 20 mA 750 kPa Flow [L/min] Output 150 Rated flow [L/min] Min.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60 20 FZ 20 64 20 A + Stroke 4-FD 25 65 22 34 30 72 22 40 40 89 22 50 Rear

MB1

L (Example) Y69BL 5m .

HEC_001W-E

Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Heating capacity W Radiating water flow rate L/min 800 600 400 1 3 5 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12

MIW/MIS

Therefore select MIW (MIS) 20. 3 Escapements Series MIW/MIS Operating range MIW12 MIS12 MIW20 MIS20 The graph at right shows conditions of the work piece to be stopped; that is, the weight, transfer speed and the operating range of the point of application L. 30 20 10 L=120mm L=100mm L=80mm L=60mm L=40mm 20 L=90mm L=70mm L=50mm L=30mm 10 Work piece weight kg Work piece weight kg 5 5 1 1 Point

Cylinder with Lock

1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109 74 M10 x 1.5 5 17 9.5 With Rod Model L Min. length Max. length 32 250 Made to Order Auto Switch 2500*1 40 250 50 300 63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.