Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

Compact Guide Cylinder Series MGQ

140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 D0.1 -X Individual -X C dimension for a bore size of 32 to 100 is identical to the A dimension. 0.01 500 400 300 200 100 Max. speed (mm/s) 341 Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F(N) Stroke (mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL

MGQ

39 12 16 20 25 32 40 50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke

VFA3000

DXT031-38-1A1 pc.

Compact Cylinder

This product should not be used as a stopper.

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Refrigerated Air Dryers Series IDF/IDU

30 A 60 81 148 45 A 36 50 73 133 60 A 74 151 75 A 46 122 146 50 80 A 60 60 55 148 36 73 166 70 44 Series IDF/IDU E Options 4 Refer to How to Order pages 26, 30, 33, 36 and 39 for optional models.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

A A A A SETTINGS 119.5 119.5 SV 1 0 R1 EA EB MOD/NET PWR MODEL SQ (SI No.EX124-SDN1) 150.5 158 SMC P R2.7 SYJ R2 B B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2

JXCx-OMU0026

25 38 25 38 25 -113No.

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Refrigerated Air Dryers

p. 38 Dust-protecting filter set *3 For preventing a decline in the performance of air dryers, even in a dusty atmosphere.

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Soft Start-up Valve

: AV00--D/Y--A (mm) Dimensions Standard specifications Port size A B C D E1 E2 G H J Model 1(P) 2(A) 3(R) AV2000-02-1 to 6D/Y(Z)-A 1/4 1/4 1/4 66 97 47 24.5 20 20 33 Width across flats 22 30 AV3000-03-1 to 6D/Y(Z)-A 3/8 3/8 3/8 76 97 50 29.5 20 20 38 Width across flats 24 35 AV4000-04-1 to 6D/Y(Z)-A 1/2 1/2 1/2 98 107 56 39.5 26 26 49 Width across flats 30 33 AV5000-06,10-1 to 6D/Y(Z)-A 3

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

IDG

When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.