Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

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AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

AS

AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D. Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603.

Nozzle Type Ionizer IZN10E Series ®

Please install so as not to receive a moment force on the nozzle (page 25). 10

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 3/8-03-06AS3211FG-03-06-03-06-03-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 3/8-03-06AS3211FG-03-06-03-06-03-06

Electro-Pneumatic Proportional Valve Series VEF/VEP

1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886 Series VEF/VEP Electro-Pneumatic Proportional Valve Application Example How

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.