0.4

4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(

0.4

B A B A B A B A B A A 93.5 0 (35) 66 75 1 2 (40) 3 2 4 6 x M4 mounting hole Input block SI unit D side 8 Stations 7 6 5 4 3 2 1 U side n C8: 8 One-touch fitting C8 [3(R) EXH port] 2 x M12 4 x M8 3-pin socket DIN rail clamp screw R R 0 BUS 62.5 1 3 3 60 X X 40.5 2 B B B B B B B B 12 12 PWR 3 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) M3 C8: 8 One-touch fitting C8 [1(P) SUP port]

Battery-less

1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

CRB2/CRBU2/CRB1

A port B port B port A port Q1: 6 Q2: 14.5 CRB1 Free-Mounting Type CRBU2 CRB2 Body (B) Body (B) Body (A) Body (A) 2-M3 x 0.5 (connecting port) 5 0.5 9 0 -0.036 29 CRB2BW10-DE CRB2BW15, 20, 30-DE A port B port 6-M3 x 0.5 with depth 3 (for unit mounting) 9.5 B port A port 2-M3 x 0.5 (connecting port) 2-R 8.5 3-Q2 3-Q2 3-3.4 with depth

HRX-OM-W002

PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M FAN OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t

HRX-OM-X084

See Table 3-3. Use a power supply suitable for the specifications of the product. Use a power supply of over voltage category 3 (IEC60664-1)*. Be sure to connect the ground connection. Ensure that a lock out facility is availble on the power supply. Each product must have its own separate earth leakage breaker. Otherwise there can be a risk of electric shock or fire.

REA/REB

M L1 3. Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

HRX-OM-X071

See Table 3-3. Use a power supply suitable for the specifications of the product. Use a power supply of over voltage category 3 (IEC60664-1)*. Be sure to connect the ground connection. Ensure that a lock out facility is availble on the power supply. Each product must have its own separate earth leakage breaker. Otherwise there can be a risk of electric shock or fire.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

CY1

7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Electric Actuator with Integrated Guide

Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

New

Step 1 Symbol Item Selection item Size q 3 Select from Flow rate Pressure. vBody material vPort size vOrifice diameter Size 3 w VX2 3 A q A 0 Body material Aluminum Port size 1/8 w A 2 Orifice diameter Step 2 Select electrical specification.

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

Auto Switch Guide

Supply voltage Internal voltage drop of switch > Minimum operating voltage of load 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator for right (MODEL D-A6/A80/A80H/A90/A90V/C80/R80/90/E80A/ Z80) 3) Generally, the internal voltage drop will be greater with a 2wire solid state auto switch than with a reed switch

Integrated Controller

Excessive load will be applied to the piston rod, resulting in damage to the actuator and a reduced service life of the product. Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9.

Auto Switch Guide

Supply voltage Internal voltage drop of switch > Minimum operating voltage of load 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator for right (MODEL D-A6/A80/A80H/A90/A90V/C80/R80/90/E80A/ Z80) 3) Generally, the internal voltage drop will be greater with a 2wire solid state auto switch than with a reed switch

Auto Switch Guide

Supply voltage Internal voltage drop of switch > Minimum operating voltage of load 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator for right (MODEL D-A6/A80/A80H/A90/A90V/C80/R80/90/E80A/ Z80) 3) Generally, the internal voltage drop will be greater with a 2wire solid state auto switch than with a reed switch