Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector

Electric Rotary Table

Nil A1 B1 (13.5) S Standard cable A6 B6 1 2 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Modular Type Air Filters Series AF

Note 3) Bowl assembly for the AF30 to AF60 models comes with a bowl guard (steel band material). 332 Air Filter Series AF10 to AF60 Dimensions AF10, AF20 AF50, AF60 T N S M J U Bracket (Option) Bracket (Option) D R B C T M J V Q N S IN OUT D U OUT R C 2 x P (Port size) V Q IN OUT o s Clearance for maintenance OUT Drain G A 2 x P (Port size) AF30 to AF40-06 B D J M U N S T Bracket (Option)

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(different sides/same side) 10 100 100 110 120 D-A5, D-A6 D-F5, D-J5 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs. (same side) 10 + 55 110 + 55 120 + 55 100 + 55 100 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs. (different sides/same side) 20 100 100 110 120 D-A59W (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs.

Air cylinder

(Same side) 20+55(n2)/2 n=2, 4, 6, 8 D-F5NT 10 1 switch 20 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7H D-Y7W 1 switch, 2 switches (Different side, Same side) 15 10 10+40(n2)/2 n=2, 4, 6, 8 Other qty. 15+40(n2)/2 n=2, 4, 6, 8 1 switch, 2 switches (Different side, Same side) D-Y69 10 D-Y7PV D-Y7WV 10+30(n2)/2 n=2, 4, 6, 8 Other qty. 1 switch, 2 switches (Different side, Same side) 20 D-Y7BA 20+45(n2)/2 n=

0.

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

PFxx-OMX0007

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L

Fieldbus system Ethernet POWERLINK compatible SI unit

Do not remove seal cap. *1: Individual grounding should be provided close to the product with a short cable. 24 EX## OMS1015-A Mounting and Installation Wiring Connector pin assignment (1) EX600-ED2Configuration Pin number Signal name 1 24 V (Output) 2 0 V (Output) 3 24 V (Control and input) 4 0 V (Control and input) 5 FE (2) EX600-ED3Configuration Pin number Signal name 1 0 V (Output) 2

Low Profile Guide Type

-wire IC circuit 5 V, 12 V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire

MXQ

M9P 3-wire (PNP) M9BV M9B 12 V Relay PLC 2-wire Grommet 24 V Yes F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked with are produced upon receipt of order.

100

pressure detection port Branch Dimensions ZL6mmm-m (Without supply valve or release valve) ZL6 Without valve Branch Vacuum (2/V) port1 2(V) 2(V) 2 x Rc1/2, G1/25, NPT1/2 (Recommended tightening torque: 28 to 30 Nm) 2(V) 1(P) With vacuum With pressure Branch Silencer exhaust EXH With vacuum pressure switch pressure detection port gauge EXH. port exhaust G 121 32 P Vacuum pressure detection

MHF2

26 Solid State Switch/Direct Mounting D-F9N(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) In-line D-F9P D-F9N Perpendicular D-F9BV D-F9NV Perpendicular D-F9B Perpendicular D-F9PV Auto switch symbol In-line In-line Electrical entry 3-wire 2-wire Wiring method PNP NPN Output method IC circuit, Relay, PLC 24VDC relay, PLC Applicable load 5, 12

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

For low differential pressure Rated pressure range 0 to 2 kPa C 0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller Series PSE300 Internal Circuit PSE30 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Series MXP Precision Air Slide Table

Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.

Toggle Type Air Gripper

2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5V, 12 V 12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93 A90 A96V A93V A90V IC circuit IC circuit 5 V 12 V 3-wire (NPN equivalent) Yes Grommet 100 V Relay, PLC 2-wire 24 V No 5 V,12

Table of Contents

8 02 2 stations 1 2 1 2 U side mounting D U D side mounting 08 1 Side 2 Bottom 8 stations M Mixed Common Common Max: 8 stations For bottom ported: Rc 3/8 only.