0.4

0 1 " !2 0 !2 1 " 1 ) " 3 . # / " . # / " ' ) 3 3 ) ' " 0 ) ) 4 3 1 0 !2 1 " 1 " 0 !2 1 -) " )* + , . # / " . # / " D ! " $%& "# $%& ' 0 !2 1 " 1 " 0 !2 ' * "# $%& 1 ) ) . # / " E "!#$ %! ! &%&&% !

High performance type Step Motor Controller (Servo/24 VDC)

0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1

0.4

SV Applicable connector: Flat ribbon cable connector (26P) (Complies with MIL-C-83503) SYJ L2 L1 6.5 34.5 P = 16 34.5 SZ 73.5 <77.5> 0.9 (12) 13 Indicator light Manual override VF 1 1 VP4 VQ 1/2 VQ 1/2 (35) (5.5) 120 <126.9> 80 4 46.2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ 10.6 35 4 x M5 mounting hole 23.5 52 SQ (5.25) (L3) (L4) 73.5 VFS VFR VQ7 n 8 7 6 5 4 3 2 1 D side Stations U side C10 [3(R) EXH

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

LEC-OM02904

8 8 8.1~8.38.4 8.1 8.28.3 ALM 92 CPU OFFON 96 10 9F 12 1(RAM) E0 13 E1 1 15 2(EEP-ROM) E3 16 1() E4 17 E6 19 3(Flash-ROM) E7 1A E8 20 2 E9 OFF 21 3 EC 2 24 ED 25 30 (1) (1) (1) 31 32 33 34 1 (2) 35 36 2 37 3D 45 (1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1

LEC-OM005xx

)Initial screen . 52 (2) Easy mode Menu . 52 (3) Easy mode DATA . 53 (4) Easy mode MONITOR . 56 (5) Easy mode JOG . 56 (6) Easy mode TEST . 58 (7) Easy mode ALARM . 59 (8) Easy mode SETTING . 60 6.3 Detail normal mode functions . 62 (1) Initial screen . 62 (2) Normal mode Menu . 62 (2-1) Menu screen . 62 (2-2) Menu items . 62 (3) Normal mode Step data . 63 (3-1) Step data setting screen .

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y VS7 (Example) D-sub connector kit with 3m cable Series Manual override B C VV5Q11-09C6FU21 set-Manifold base No. VQ1100-52 sets-Valve No. (Stations 1 to 2) VQ1200-54 sets-Valve No. (Stations 3 to 6) VQ1300-52 sets-Valve No. (Stations 7 to 8) VVQ1000-10A-11 set-Blank plate No.

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

Compact Manifold Regulator Series ARM5

8 1 8 ARM1000 57 1 8 1 8 VEX1 1 4 1 8 ARM2000 136 1 8 1 8 SRH How to Order SRP ARM 1000 A1 5 01 G SRF Option Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting ARX20 Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

VDW

1/8 1 (IN) port 8.5 (6.3) VXA 6 12.8 VCHm 1/8, 1/4 1 (IN) port 1/8, 1/4 2 (N.C.) port 2 x M3 x 5 Dimensions inside ( ) are for port size 1/8.

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

AC Servo Motor Driver (Pulse input type/Positioning type)

1) (Note 1) A.52 Error excessive A.8E USB communication error 888 Watchdog 92 - 3-digit, 7-segment Name The servo motor stops No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700

New

4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31 35 43 45 37 41

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.