OUT2 17 OUT output bit Accumulated 1 32 Accumulated 2 33 Flow rate 1 34 Flow rate 2 35 Connected with hardware output SW output bit (Not connected as OUT2 does not have the hardware) Temperature 1 36 Temperature 2 37 Pressure 1 38 Pressure 2 39 Pulse output 2 65 This is valid only when the output object of OUT2 is pulse output.
Electric actuators/Common precautions .52 15.1 Design and selection .52 15.2 Mounting.53 15.3 Handling.54 15.4 Operating environment .55 2 - 15.5 Maintenance .56 15.6 Precautions for actuator with lock.56 16.
7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !
Dimensions inside ( ) are for the model with brake. 130 2-8H10 depth 10 4-M8 x 1.25 thread depth 20 70 20 Work piece mounting reference plane 195 (225) 187 (217) 100 135 52 52.5 185 (215) 172 (202) 7.5 Stroke + 120 (table movement range) Stroke + 129 (table movement range) 29 33 92 2-T-slot 1 85 90 35 Stroke + 334 (364) 2-T-slot 2 90 62 3-8 H 10 depth 20 Stroke + 32 92 Body mounting reference
1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 Type Symbol Nozzle part no.
4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !
2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
A B (mm) Model A 21h9 28h9 35h9 35h9 B 2 2 2 2 Weight (g) 805 1,097 1,943 2,825 MHT2-32DZ-X5070 MHT2-40DZ-X5070 MHT2-50DZ-X5070 MHT2-63DZ-X5070 0 0.052 0 0.052 0 0.062 0 0.062 653 A
E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.
D-sub] BUS OUT BUS P 1 P 1 BUS IN E 3/5 E 3/5 2 2 B B 2 2 PWR PWR 4 A 4 A 4 4 Note 1) These figures show the SS5Y3-12SQA-05D.
, 25, 40 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 Material (Color) NBR (Black) Hardness 50 shore F L AT T Y P E D:4 D:6 Model A B C Y E F G E F G ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20.6 15.6 10.4 21.6 16.6 12.8 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 MORE DIMENSIONS S E E N E X T P A G E A P P L I C A B L E T U B E Applicable Tube O.D.
Style) P + Stroke Y LF + Stroke WF AA D Across Flats 2-EE (NPTF) DD KK EA MM BA B E/2 4-NT ND Deep TN C G J R XT SN + Stroke ZB + Stroke A E (in) J SN P LF ND D EE E Bore (in) Y E/2 TN WF A EA XT MM DD C BA G KK AA B ZB NT R 1.1 2 1/4 2.36 3 5/8 9/32 9/16 3/8 2 150 (1.5") 1.71 1 5/8 1 3/4 0.3 1 15/16 5/8 1/4-28 3/8 1 1/8 1.26 7/16-20 2.02 1 1/8 4 3/4 1/4-20 1.43 1.06 2 1/4 2.4 3 5/8 7/16
VQ7 4 27 27 3 x 3/8",1/2" 2 x 3/8" (P , A, B port) (EA, EB port) 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR421 -E, VFR421 -D 3 position closed center: VFR431 -E, VFR431 -D 3 position exhaust center: VFR441 -E, VFR441 -D 3 position pressure center: VFR451 -E, VFR451 -D 2 183 2 1/8" 31 8 4 x 2.3 2 x 6.5 (PE port) 3 (Mounting hole) Manual override (Non-locking) 5 42 62 53 Applicable
R407C (HFC) IDU E FUSE B OUT PUT IN PUT E D 4 x F A Input cable 2 m Specifications/Dimensions [mm] Part no.
Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !
R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.
position single (A) 4 (B) 2 1 SY5000 5 (EA) 3 (EB) 1 (P) 2 position double (A) 4 (B) 2 2 SY7000 5 (EA) 3 (EB) 1 (P) 3 position closed center (A) 4 (B) 2 3 Manual override 5 (EA) 3 (EB) 1 (P) 3 position exhaust center Nil: Non-locking push type E: Knob locking type D: Slotted locking type (A) 4 (B) 2 4 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 3 (EB) 1 (P) Rated voltage
CE CD CJ0.005 CM CF CC CK0.015 Front screw clearance hole / NC(D)Q8E(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 0.34 0.20 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 4-E 0.34 0.20
(Hysteresis mode, error output, switch output off) (Window comparator mode) -42No.PS-OMV0009-E 2 value display The 2 value display function displays the items listed below on the right and left side of the sub display.