Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Compact Guide Cylinder

12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5 9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5 90 M5 19 19 27 M6 x 1 15 M6 x 1 5.4 9.5 7 Rc1/8 NPT1/8 G1/8 12.5 11 30 22 Bore size [mm]

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Basic Type/Direct Mount Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked are produced upon receipt of order. Other than the applicable auto switches listed in How to Order, the other auto switches can be mounted. For detailed specifications, refer to page 1479.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

CXS

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2

CXS

Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2

Stroke Reading Cylinder and Counter

x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod end nut accessory bracket, refer to page 658.

Fitting Type: T (Union Tee), Size Combination-A Side: 6A (Applicable Tubing Size 1" x 7/8", Flange 25A), Different Diameter-B Side: 6B (Applicable Tubing Size 3/4" x 5/8", Flange 25A)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: D (BC6, Copper Body & Shading Coil, FPM Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 1 (100VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: C (Conduit)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor)