Series KV2 Fittings

22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.

20

Note) 34.2 Note) 32 Note) Width across flats 22 102 30 A 117.5 Rc, NPT, G 1/4, 3/8 One-touch fitting S coupler plug S coupler plug mounting (Series KQ2H) mounting (KK4P-02MS) mounting (KK130P-02MS) VMG12/Piping entry:Top 34.2 Note) 32 Note) B Note) Rc, NPT, G 1/4, 3/8 Width across flats 22 Rc1/4 Nozzle S coupler plug S coupler plug One-touch fitting 172.5 Note) 170.8 Note) mounting (KK4P-

CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

KR

22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53 42 34 22 1 4 3 8 KRH12-02S KRH12-03S 28.5 23.5 19 22 46.1 58.3 12 1 2 KRH12-04S 22 51 22 Straight Union: KRH M Effective area (mm 2) Weight (g) Applicable tubing O.D.

SZ3000

Stations Scale: 37% Stations [With external pilot] 2n1-M5 x 0.8 (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting 2-One-touch fitting 2n2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 (P, R ports) Applicable tube O.D.: 8 (A, B ports) Applicable

OMU0023

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.

Cylinder with Lock Series CNS

Ht 56 56 34 A B 30 (33) 36 Approx. Hs Approx. Hs Auto switch Numbers in ( ) are for type D-F5LF. D-A4 D-A5/A6 G(PF)1/2 Auto switch 34.5 (compatible cable O.D. 6.8-11.5) Approx. Ht Approx. Ht A B B Approx. Hs 33 36 Auto switch A Approx.

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

Activated Carbon Filter

P A B C D E G J M N Q R S T U V AMK20 1/81/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30 1/43/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40 1/43/81/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 semi-standard bowl Semi-standard specifications Model Metal bowl No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

16.5 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

Basic Type/Direct Mount Type

B Counter bore depth C T T Y HT HP P (Piping port) (Operating direction: A) L 0 -0.1 22 8 Note 1) TC X F 14 WP 19.5 12.5 D 30 13 WS GP GW 4 x LD PW QW Plug 12.5 P (Piping port) (Operating direction: B) 2 x 4 x MM Thread depth M Switch rail HR HS CR W K Plug G G Z + Stroke Q + Stroke CY3RG15 P (Piping port) (Operating direction: B) CY3RG25, 32, 40, 50, 63 Note 1) 50, 63: L 0 0.2 CY3RG10 B

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

1.63

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

SZ3000

23 Cassette Type Manifold Plug-in Type Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60PD Stations B(26 pins) 2n1-M5 x 0.8 [4(A), 2(B) port] With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 SV 34 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 SZ P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A

Process Valve Series VNA

(305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Regulator

34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30K-D 27.8 43 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40K-D 27.8 52 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40K-06-D 27.8 52 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50K-D 27.8 61.5 70 75 66 11 22 113 3.2 AR60K-D 27.8 61.5 70 75 66 11 22 113 3.2 The dimension of B is the length when the regulator knob is unlocked. -30- Revision history 40-06,50,60

Wedge Cam Operation Provides

0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa

SL5200

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101