Option symbol T Option symbol S With terminal block for power supply, run & alarm signal and remote operation Power supply terminal block connection IDFB3E-11 to 22E-11 IDFB4E to 75E The option allows the connection of a power cable to a terminal block. 200 V and 460 V specifications are equipped as standard.
To use the power of the device, the total load current must be 200 mA or less. 2 Refer to 2.4.2 Contact output signal 4 to 6. 3 For option D With electrical conductivity control, it can be set. 2.2 Communication specification HRS400-A-46 2-2 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.2-3 / PIN No.
29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5
Clamp arm 0.05 MPa or less Lock at extended direction (unclamp direction) 1.0 MPa Round, Diamond Guide pin shape Locking direction Refer to Selection in page 22 regarding detailed specifications of the clamping force, etc.
SA Y59B MF 200 32 Straight Type Number of auto switches 3-dimensional transfer single unit Bore size 2pcs. 1pc. "n" pcs. Nil S n Auto switch type 15 32 15mm 32mm Nil Without auto switch Refer to the table below for auto switch part numbers. Straight type Stroke Air supply unit Note 1) 200 250 300 350 400 450 500 600 1000 200mm 250mm 300mm 350mm 400mm 450mm 500mm 600mm 1000mm Qty.
Refer to page 13-3-22. Refer to (4) below. ZR1-FZ (30 m) t Note) ZSE2-OR-15Note) Precautions on handling the filter case 1. The case is made of polycarbonate.
M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.
ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.
Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No
5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type
Example: Power supply is 24 VDC Internal voltage drop in auto switch is 4 V. 22
Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.
EX245-EA2-1/2 9.1. . 9-1 EX245-EA2-1 . 9-2 EX245-EA2-2 61 No.EX-OMU0020CN 9.2. . 9-1 EX245-EA2-1 (WLH) mm 28.612061.5 200 g . 9-2 EX245-EA2-2 (WLH) mm 1412061.5 200 g EX245-EA2-2 P 36, 0.80.05Nm) 62 No.EX-OMU0020CN 10. 10.1. (EX245-DX1EX245-DY1) 88 EX600-ZT1 . 10-1 (EX600-ZT1) 63 No.EX-OMU0020CN 10.2.
Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.
, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.
19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10