Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 17.5 18 1 .5 (Pitch) P = 10.5 10-SS5YJ3-32, S32Stations -M5 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

MU

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

CJ2

4 13 4 9 5 11 4 8 5 C85 C95 CP95 5 5 NCM Since this is a guideline including hysteresis, not meant to be guaranteed.

SYJ3000/5000/7000

28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-22 5 Series SYJA5000 4/5 Port Air Operated Valve Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 2 position

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

CY1

CY1B40L 0.95 CY1B50H 3.12 50 CY1B50L 1.83 CY1B63H 5.07 63 CY1B63L 3.09 Contact SMC before using fittings which exceed the above weights. 5 Series CY1B 6 Series CY1B Magnetic Rodless Cylinder Basic Type Dimensions Basic type CY1B6, 10, 15 (mm) MM x J M3 x 0.5 x 4.5 M3 x 0.5 x 4.5 M4 x 0.7 x 6 D 7.6 12 17 B 17 25 35 F 9 9 10 G 5 5 5.5 H 14 12.5 13 K 5 4 11 L 35 38 57 N 10 11 11 NA 14 14 17

CNA

D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34 50 34 34 34 35 38.5 47 10.5 9.5 9 7 8 38 MLGP 41 63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Battery-less

5 r t w q y !6 !

HRX-OM-X084

Standard setting menu . 5-8 5.3.6 Alarm Setting Menu . 5-9 5.3.7 Communication setting menu . 5-10 5.3.8 Reset menu . 5-11 5.3.9 Information Monitor Setting Menu . 5-11 5.4 Basic setting mode . 5-12 5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CLA

14 113 21 30 72 80 750 20-750 23 17 M12X1 .75 11 M22X 1. 5 100 -750 20750 37 40 11 6 140 V 'I.. 92 30 52 14 124 21 31 76 25 19 M12X 1.75 11 M26X1 .5 IBore Size (mm) MM X1US N Without Boot With BootLZ H ZZ ee f h !

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CM2

12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

-5-2 11-5-3 3 Series MSU Precautions Be sure to read before handling.

Support Guide/11-LEFG Series

307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D E 11-LEFG40-S-650 854 657 828 12 5 750 11-LEFG40-S-700 904 707 878 11-LEFG40-S-750 954 757 928 11-LEFG40-S-800 1004 807 978 14 6 900 11-LEFG40-S-850 1054 857 1028 11-LEFG40-S-900 1104