Air cylinder

9.5 6 40 10.5 10.5 8 8 15.5 15.5 9.5 9.5 50 12 11 9.5 8.5 17 16 11 10 63 13 12 10.5 9.5 18 17 12 11 80 18 14.5 15.5 12 23 19.5 17 13.5 100 18 15.5 15.5 13 23 20.5 17 14.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 18 Table 6 (mm) Support bracket other than Center trunnion Number of auto switch mounted Auto switch model 32 40 50 63 80,100

90

pressure 60 40 Suction flow (Silencer exhaust) Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 50 60 Suction flow [L/min (ANR)] ZK212 Flow-rate Characteristics Exhaust Characteristics 0 10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa]

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

45

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

45

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

17 M22 x 1.5 Hexagon width across flats 30 8 50 8 Width across flats 19 10 H 70 4 x M5 x 0.8 Width across flats 60 G 11 F E Y 4 40 C A B D Dimensions (mm) A B C D E F G H Y Model ZPT100HBJ25-01-A22 104.5 178.5 50-01-A22 140.5 214.5 100 103 69 107 47.5 60.5 35.5 75-01-A22 180.5 254.5 100-01-A22 215.5 289.5 ZPT125HBJ25-01-A22 113 187 50-01-A22 149 223 125 129 89 135 56 69 44 75-01-A22 189

A_HEC-OM-K001

water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-12 Heating capacity (HED007) 9.5 Performance Chart 9-16 A_HEC-OM-K001-1.7 Chapter

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VQ

/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Compact Slide Series MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Up to 100 Up to 300 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) 50 (4) 200 (6) 50 (7) 200 (9) 50 (10) 200 (12) (2) 100 (5) 100 (8) 100 (11) Load eccentricity (l mm) (1) (3) Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also

Hydraulic Cylinders

depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Platform Cylinder Series CXT

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

48.4 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 12.9 39 48.8 43.8 R 1/4 23 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 54.4 47 21 31 43.7 38.7 10 18.5 3/8" 17.9 67 20.2 40 16.2 23 AS331FG-02-12 AS331FG-N02-07 34.4 56.2 50 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 12.9 20.6 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Digital Flow Switch (Remote type sensor unit)

11/4, 11/2 104 74 31 52 39.5 PF3W521 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 76.6 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0010-J PF3W504/520/540/511/521 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W504--T 81 50 PF3W520--T 89 54 PF3W540--T 109 71 PF3W511--T 135 92 PF3W521--T 115 74 PF3W521-F12-T 119 76 PF3W521-F14-T 123 78 -43No.PF-OMN0010-J PF3W504

MHF2

15.8 58 E 5.9 11 11 14 19 E 0 -0.1 4-2.6 through (mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3 x 0.5 thread depth 4 Mounting thread 50 M2.5 x 0.45 Groove for auto switch mounting 4 1.3

MXW Series Long Stroke Slide Table

direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50 37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/8 Operation direction B Taper thread plug with hexagonal hole Operation direction B A 28 14 28 14 13 A 12 76 62 17 36 A 38 Z Cross section AA (scale 30%) (N-1) x H G H 9 N-M8 x 1.25 thread depth 16 8H9 +0.036 depth 9 0 Bottom through hole 6.6 F E 8H9 +0.036depth 9 0 Model