39

A002 CKZ Arm 63 Arm code (Refer to page 3 and 8 through to 11.)

1.63

speed of 200 mm/s.

Flow Control Equipment

Symbol None Sealant S Applicable tube O.D.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

s m 2.

7

38 L Hole: 12 +0.027 H8 0 30 30 17 17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread

MY2

Piston speed mm/s Piston speed mm/s Piston speed mm/s 10 Mechanically Joint Type Rodless Cylinder Series MY2C Cam Follower Guide Type/16, 25, 40 How to Order Cam Follower Guide Type MY2 G 16 C 300 L F9N Number of auto switches Guide suffix C Cam follower guide Nil S n 2 pcs. 1 pc.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

CEx-OMI0064

8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 750, Max. Transportable Mass Range (Horizontal)(kg): 20.1 to 50.0, Max. Transportable Mass (Horizontal)(kg): 30, Max. Transportable Mass Range (Vertical)(kg): 2.1 to 5.0, Max.

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings

Plate Cylinder with Lock Series MLU

from switch is 1mA 11

RQ

94 11 17.5 Rc 3/8 40 to 100 Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 7-7-14 for details on rod end nut and accessories.

CXT

CXT 12 16 CXT20 CXT25 CXT 32 40 Model Symbol Specifications -XB13 Shock absorber model Low speed cylinder (5 to 50 mm/s) RB2015 RB1411 RB1007 RB0806 Max. energy absorption (J) 58.8 14.7 5.88 2.94 Stroke absorption (mm) 15 11 7 6 Collision speed 0.05 to 5 m/s Max. operating frequency (cycle/min) 25 45 70 80 10 to 80C Ambient temperature Extended 8.34 6.86 4.22 1.96 Spring force (N) Retracted