Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

53

Page 150 Circulating Fluid Typical Physical Property Values ... Page 150 Options With Earth Leakage Breaker . Page 145 Specific Product Precautions . Page 151 With Automatic Fluid Fill Function . Page 145 Applicable to Deionized Water Piping . Page 145 Conforming to CE/UL Standards .

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

Vacuum Module Series ZX

Filter JIS Symbol 32 41 51 2 x R1.8 1 10 8.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2 x 3.5 (Mounting hole) (62) 58 50 8 OUT IN 18 15.5 4 11 20 4.2 6.8 11 8.8 Bracket A (Standard accessory) Note) Dimensions : For A mounting bracket. Filter case About this product Caution The filter mounted on the product is a simplified one.

10

[mm] Adjustment bolt (Mountable on either right or left) A Model A B C D E F MM MHL2-10DZ-X28 22 15.5 2.5 7 4 2 Max. when adjusted: E M5 x 0.8 MHL2-10D1Z-X28 11 16 MHL2-10D2Z-X28 11 16 MHL2-16DZ-X28 27.5 18.5 3 8 B 9.5 9 M6 x 1 MHL2-16D1Z-X28 13.5 20 MHL2-16D2Z-X28 13.5 20 MHL2-20DZ-X28 32.5 21 4 12 MM 7.5 7 M8 x 1 MHL2-20D1Z-X28 8.5 9 MHL2-20D2Z-X28 8.5 9 MHL2-25DZ-X28 38 26 5 Closing stroke

21

M9BW With auto switch CDM3 L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil S n Mounting Bore size 2 pcs. 1 pc. n pcs.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

Fieldbus system EtherNet/IP compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.250 words MAX.500 byte Output MIN. 1 word MIN. 2 byte MAX.248 words MAX.496 byte When configuration assembly fundtion is not used: Set to "0".

1.1

Thermo-cooler side Customers equipment side 9 RD Circuit configuration diagram 10 SD Internal circuit L N 1 2 3 4 5 6 7 8 9 10 11 11 SG Power supply cable Signal cable Communication cable outlet (also used as signal cable outlet) Front side Power cable entry 11 Series HRGC Option symbol T High-lift Pump Option combination ( : Available, : Not available, : Possible, but specification needs

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Response time ms (at 0.5 MPa) Note 1) 10 to 50 (No freezing. ) 15 or less Max. operating frequency (Hz) 10 Non-locking push type, push-turn locking slotted type, push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note 2) Main/Pilot valve common exhaust Body ported Not required Unrestricted 150

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte Output MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte When configuration assembly fundtion is not used: Set to "0".

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L2 = 16n + 22 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 43 54 75 85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5 198 171 182 212.5 223 187 198 225 235.5 203 214 237.5 248 219 230 250 260.5 235 246 275 285.5 251 262 287.5 298 267 278 300 310.5 283 294 325 335.5

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

S 6 50, 100, 150, 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com "n" pcs. n 8 50, 100, 150, 200, 250, 300 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Nil Without auto switch Adjuster option Nil Rubber stopper B Shock absorber Metal stopper One

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRZ HRZD HRW Lots of variations are available in response to the users requirements.

SMC Wireless System EtherNet/IP ® compatible

No.EX-OMU0028-D PRODUCT NAME SMC Wireless System EtherNet/IP compatible MODEL / Series / Product Number EX600-WEN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication

SMC Wireless System PROFINET compatible

No.EX-OMW0006-D PRODUCT NAME SMC Wireless System PROFINET compatible MODEL / Series / Product Number EX600-WPN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication and

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering