Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x

Low Profile Air Gripper Series MHF2

4 (Mounting thread) 11 58 458 Low Profile Air Gripper Series MHF2 Dimensions MHF2-12D 15 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 2 x M4 x 0.7 thread depth 10 (Mounting thread) 4 42 4 40 52 20 38 2 x M4 x 0.7 thread depth 5 (Mounting thread) E 7.7 14.8 15 19 25 E 2 x 3.4 through (Mounting hole) MHZ 0 0.1 20 18 18 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port MHF 2 x 5.5 1

Pin Clamp Cylinders

11 15 15 538 Pin Clamp Cylinder Plate Cylinder Type Magnetic Field Resistant Auto Switch/Small Auto Switch Mounting C(L)KU32 Series Dimensions CKU32 (Clamping height LOW type) * Refer to How to Order for positional relationship of the mounting surface and port. * The figures below indicate the CKU32-lRAL-X2321. 14.50.1 14.50.1 (29) 27 70 D d Q Q 0 0.05 120 K C SR 87.5 45 15.5 14.5 26 (4)

LEYx-OMZ0015

Top mounting [LEY25/32/63] (Right / Left side parallel) 24 25 19 22 23 16 11 20 21 18 10 9 17 7 7 12 13 14 15 1 2 3 4 5 6 8 In-line [LEY63] In-line [LEY25/32] Rod end male thread 26 24 32 26 29 30 27 28 27 31 27 28 27 25 7 Parts list No.

PC Wiring System Series PCW

15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7 1

Fieldbus system EtherCAT compatible SI Unit

The valves do not Refer to Fault 11 work correctly. The digital input or output Refer to Fault 12 device does not work correctly. The analogue input or Refer to Fault 13 output device does not work correctly. Refer to Fault 14 The IO-Link device does not work correctly. The temperature Refer to Fault 15 measurement unit does not work correctly.

Clamp Cylinder Series CK1

(for YA type) 2 x M6 thread depth 11 (for IA type) 15 15 CK1 2 x M6 thread depth 11 (for YA type) 33 2 x M6 thread depth 11 (for IA type) 15 CLK2 20 20 40 57 17 17 A 20 19.5 0.2 0.5 15 25 45 45 60 60 Material: Cast iron Material: Cast iron Unit: mm Part no.

Modular F.R.L. Unit

Threads for IN and OUT ports are not machined. 40 40 28 11 11 AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 1/8, 1/4 AKM2000 53 48 34 14 13 1/8, 1/4 AKM3000 70 54 42 18 15 AKM4000 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

Hydraulic Cylinders

depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note

Ionizer

80 30 30 15 220 180 30 26 26 2 x 5.4 11 11 20 32 22 4.5 High-voltage unit full length: 220 mm High-voltage unit full length: 180 mm 31 (Full length of high-voltage unit and control unit) (Full length of high-voltage unit and control unit plus 62 mm) With bracket How to Order IZS31 180 X210 R Sensor Bar type Without bracket With bracket Note) Nil Bracket Without sensor Autobalance sensor

JCRB-OM00003

Graph 1 15 Kinetic energy Allowable kinetic energy is shown in Table 1.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Valve Single Unit

nickel plated) Gasket M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SY3000-11-25 SX5000 SY5000-11-15 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Clamp Cylinder with Lock

(for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

OMS0020

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Frame Format . 12 5.3 Command List . 14 5.4 Command Details . 15 (1) Step Data Setting Command "EE" Details . 15 (2) Step Data Save Command "EU" Details . 22 (3) Step Data Reflection Command "AB" Details . 22 (4) Monitor Command "MO" Details . 23 (6) Details on Operation Command "OE"Details . 26 (7) Alarm History

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Do not use a shock absorber together with air cushion. 2000 1500 Collision speed (mm/s) L unit Air Cushion Stroke 1000 Air cushion Bore size (mm) Cushion stroke 500 400 300 16 12 20 15 25 15 200 32 19 1002 3 5 10 20 50 40 24 30 100 4 50 30 Load weight (kg) 63 37 8-12-10 11 Model Selection Series MY1W Cushion Capacity Tightening Torque for Stroke Adjusting Unit Holding Bolts (Nm) Precautions

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12)

MTS

32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (